9/16/2010	12:00:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/16/2010	12:00:28 PM	Recipe started at 12:00 PM
9/16/2010	12:00:28 PM	H2 valve closed
9/16/2010	12:00:28 PM	BCl3 valve closed
9/16/2010	12:00:28 PM	PH3 valve closed
9/16/2010	12:00:28 PM	SiCl4 pre valve closed
9/16/2010	12:00:28 PM	SiCl4 post valve closed
9/16/2010	12:00:28 PM	Main Vac valve closed
9/16/2010	12:00:28 PM	Bypass valve closed
9/16/2010	12:00:28 PM	Bubbler valve closed
9/16/2010	12:00:28 PM	Helium valve opened
9/16/2010	12:00:28 PM	Helium MFC set to  500.000000
9/16/2010	12:00:28 PM	H2 MFC set to  0.000000
9/16/2010	12:00:28 PM	BCl3 MFC set to  0.000000
9/16/2010	12:00:28 PM	PHl3 MFC set to  0.000000
9/16/2010	12:00:28 PM	SiCl4 MFC set to  0.000000
9/16/2010	12:00:28 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	12:00:28 PM	Tube furnace set to 0
9/16/2010	12:01:49 PM	Helium valve closed
9/16/2010	12:01:49 PM	H2 valve closed
9/16/2010	12:01:49 PM	BCl3 valve closed
9/16/2010	12:01:49 PM	PH3 valve closed
9/16/2010	12:01:49 PM	SiCl4 pre valve closed
9/16/2010	12:01:49 PM	SiCl4 post valve closed
9/16/2010	12:01:49 PM	Main Vac valve closed
9/16/2010	12:01:49 PM	Bypass valve closed
9/16/2010	12:01:49 PM	Bubbler valve closed
9/16/2010	12:01:49 PM	Helium MFC set to  0.000000
9/16/2010	12:01:49 PM	H2 MFC set to  0.000000
9/16/2010	12:01:49 PM	BCl3 MFC set to  0.000000
9/16/2010	12:01:49 PM	PHl3 MFC set to  0.000000
9/16/2010	12:01:49 PM	SiCl4 MFC set to  0.000000
9/16/2010	12:01:49 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	12:01:49 PM	Tube furnace set to 0
9/16/2010	12:01:49 PM	Run finished at 12:01 PM
9/16/2010	12:01:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/16/2010	12:11:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/16/2010	12:11:28 PM	Recipe started at 12:11 PM
9/16/2010	12:11:28 PM	Helium valve closed
9/16/2010	12:11:28 PM	H2 valve closed
9/16/2010	12:11:28 PM	BCl3 valve closed
9/16/2010	12:11:28 PM	PH3 valve closed
9/16/2010	12:11:28 PM	SiCl4 pre valve closed
9/16/2010	12:11:28 PM	SiCl4 post valve closed
9/16/2010	12:11:28 PM	Main Vac valve closed
9/16/2010	12:11:28 PM	Bubbler valve closed
9/16/2010	12:11:28 PM	Bypass valve opened
9/16/2010	12:11:28 PM	Helium MFC set to  0.000000
9/16/2010	12:11:28 PM	H2 MFC set to  0.000000
9/16/2010	12:11:28 PM	BCl3 MFC set to  0.000000
9/16/2010	12:11:28 PM	PHl3 MFC set to  0.000000
9/16/2010	12:11:28 PM	SiCl4 MFC set to  0.000000
9/16/2010	12:11:28 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	12:11:28 PM	Tube furnace set to 0
9/16/2010	12:12:09 PM	Helium valve closed
9/16/2010	12:12:09 PM	H2 valve closed
9/16/2010	12:12:09 PM	BCl3 valve closed
9/16/2010	12:12:09 PM	PH3 valve closed
9/16/2010	12:12:09 PM	SiCl4 pre valve closed
9/16/2010	12:12:09 PM	SiCl4 post valve closed
9/16/2010	12:12:09 PM	Bubbler valve closed
9/16/2010	12:12:09 PM	Main Vac valve opened
9/16/2010	12:12:09 PM	Bypass valve opened
9/16/2010	12:12:09 PM	Helium MFC set to  0.000000
9/16/2010	12:12:09 PM	H2 MFC set to  0.000000
9/16/2010	12:12:09 PM	BCl3 MFC set to  0.000000
9/16/2010	12:12:09 PM	PHl3 MFC set to  0.000000
9/16/2010	12:12:09 PM	SiCl4 MFC set to  0.000000
9/16/2010	12:12:09 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	12:12:09 PM	Tube furnace set to 0
9/16/2010	12:12:09 PM	Run finished at 12:12 PM
9/16/2010	12:12:09 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/16/2010	1:44:26 PM	Recipe started at 1:44 PM
9/16/2010	1:44:26 PM	Helium valve closed
9/16/2010	1:44:26 PM	BCl3 valve closed
9/16/2010	1:44:26 PM	PH3 valve closed
9/16/2010	1:44:26 PM	SiCl4 pre valve closed
9/16/2010	1:44:26 PM	SiCl4 post valve closed
9/16/2010	1:44:26 PM	Main Vac valve closed
9/16/2010	1:44:26 PM	Bypass valve closed
9/16/2010	1:44:26 PM	Bubbler valve closed
9/16/2010	1:44:26 PM	H2 valve opened
9/16/2010	1:44:26 PM	Helium MFC set to  0.000000
9/16/2010	1:44:26 PM	H2 MFC set to  500.000000
9/16/2010	1:44:26 PM	BCl3 MFC set to  0.000000
9/16/2010	1:44:26 PM	PHl3 MFC set to  0.000000
9/16/2010	1:44:26 PM	SiCl4 MFC set to  0.000000
9/16/2010	1:44:26 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	1:44:26 PM	Tube furnace set to 100
9/16/2010	1:45:48 PM	Helium valve closed
9/16/2010	1:45:48 PM	BCl3 valve closed
9/16/2010	1:45:48 PM	PH3 valve closed
9/16/2010	1:45:48 PM	SiCl4 pre valve closed
9/16/2010	1:45:48 PM	SiCl4 post valve closed
9/16/2010	1:45:48 PM	Main Vac valve closed
9/16/2010	1:45:48 PM	Bypass valve closed
9/16/2010	1:45:48 PM	H2 valve opened
9/16/2010	1:45:48 PM	Bubbler valve opened
9/16/2010	1:45:48 PM	Helium MFC set to  0.000000
9/16/2010	1:45:48 PM	H2 MFC set to  500.000000
9/16/2010	1:45:48 PM	BCl3 MFC set to  0.000000
9/16/2010	1:45:48 PM	PHl3 MFC set to  0.000000
9/16/2010	1:45:48 PM	SiCl4 MFC set to  0.000000
9/16/2010	1:45:48 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	1:45:48 PM	Tube furnace set to 1000
9/16/2010	2:05:48 PM	Helium valve closed
9/16/2010	2:05:48 PM	PH3 valve closed
9/16/2010	2:05:48 PM	Main Vac valve closed
9/16/2010	2:05:48 PM	Bypass valve closed
9/16/2010	2:05:48 PM	H2 valve opened
9/16/2010	2:05:48 PM	BCl3 valve opened
9/16/2010	2:05:48 PM	SiCl4 pre valve opened
9/16/2010	2:05:48 PM	SiCl4 post valve opened
9/16/2010	2:05:48 PM	Bubbler valve opened
9/16/2010	2:05:48 PM	Helium MFC set to  0.000000
9/16/2010	2:05:48 PM	H2 MFC set to  500.000000
9/16/2010	2:05:48 PM	BCl3 MFC set to  29.000000
9/16/2010	2:05:48 PM	PHl3 MFC set to  0.000000
9/16/2010	2:05:48 PM	SiCl4 MFC set to  50.000000
9/16/2010	2:05:48 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	2:05:48 PM	Tube furnace set to 1000
9/16/2010	2:11:48 PM	H2 valve closed
9/16/2010	2:11:48 PM	BCl3 valve closed
9/16/2010	2:11:48 PM	PH3 valve closed
9/16/2010	2:11:48 PM	SiCl4 pre valve closed
9/16/2010	2:11:48 PM	SiCl4 post valve closed
9/16/2010	2:11:48 PM	Main Vac valve closed
9/16/2010	2:11:48 PM	Bypass valve closed
9/16/2010	2:11:48 PM	Helium valve opened
9/16/2010	2:11:48 PM	Bubbler valve opened
9/16/2010	2:11:48 PM	Helium MFC set to  500.000000
9/16/2010	2:11:48 PM	H2 MFC set to  0.000000
9/16/2010	2:11:48 PM	BCl3 MFC set to  0.000000
9/16/2010	2:11:48 PM	PHl3 MFC set to  0.000000
9/16/2010	2:11:48 PM	SiCl4 MFC set to  0.000000
9/16/2010	2:11:48 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	2:11:49 PM	Tube furnace set to 0
9/16/2010	2:31:48 PM	Helium valve closed
9/16/2010	2:31:48 PM	H2 valve closed
9/16/2010	2:31:48 PM	BCl3 valve closed
9/16/2010	2:31:48 PM	PH3 valve closed
9/16/2010	2:31:48 PM	SiCl4 pre valve closed
9/16/2010	2:31:48 PM	SiCl4 post valve closed
9/16/2010	2:31:48 PM	Main Vac valve closed
9/16/2010	2:31:48 PM	Bypass valve closed
9/16/2010	2:31:48 PM	Bubbler valve closed
9/16/2010	2:31:48 PM	Helium MFC set to  0.000000
9/16/2010	2:31:48 PM	H2 MFC set to  0.000000
9/16/2010	2:31:48 PM	BCl3 MFC set to  0.000000
9/16/2010	2:31:48 PM	PHl3 MFC set to  0.000000
9/16/2010	2:31:48 PM	SiCl4 MFC set to  0.000000
9/16/2010	2:31:48 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	2:31:49 PM	Tube furnace set to 0
9/16/2010	2:31:49 PM	Run finished at 2:31 PM
9/16/2010	3:18:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/16/2010	3:18:21 PM	Recipe started at 3:18 PM
9/16/2010	3:18:21 PM	Helium valve closed
9/16/2010	3:18:21 PM	H2 valve closed
9/16/2010	3:18:21 PM	BCl3 valve closed
9/16/2010	3:18:21 PM	PH3 valve closed
9/16/2010	3:18:21 PM	SiCl4 pre valve closed
9/16/2010	3:18:21 PM	SiCl4 post valve closed
9/16/2010	3:18:21 PM	Main Vac valve closed
9/16/2010	3:18:21 PM	Bubbler valve closed
9/16/2010	3:18:21 PM	Bypass valve opened
9/16/2010	3:18:21 PM	Helium MFC set to  0.000000
9/16/2010	3:18:21 PM	H2 MFC set to  0.000000
9/16/2010	3:18:21 PM	BCl3 MFC set to  0.000000
9/16/2010	3:18:21 PM	PHl3 MFC set to  0.000000
9/16/2010	3:18:21 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:18:21 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:18:21 PM	Tube furnace set to 0
9/16/2010	3:19:00 PM	Helium valve closed
9/16/2010	3:19:00 PM	H2 valve closed
9/16/2010	3:19:00 PM	BCl3 valve closed
9/16/2010	3:19:00 PM	PH3 valve closed
9/16/2010	3:19:00 PM	SiCl4 pre valve closed
9/16/2010	3:19:00 PM	SiCl4 post valve closed
9/16/2010	3:19:00 PM	Bubbler valve closed
9/16/2010	3:19:00 PM	Main Vac valve opened
9/16/2010	3:19:00 PM	Bypass valve opened
9/16/2010	3:19:00 PM	Helium MFC set to  0.000000
9/16/2010	3:19:00 PM	H2 MFC set to  0.000000
9/16/2010	3:19:00 PM	BCl3 MFC set to  0.000000
9/16/2010	3:19:00 PM	PHl3 MFC set to  0.000000
9/16/2010	3:19:00 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:19:00 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:19:00 PM	Tube furnace set to 0
9/16/2010	3:19:00 PM	Run finished at 3:19 PM
9/16/2010	3:19:00 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/16/2010	3:31:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/16/2010	3:31:49 PM	Recipe started at 3:31 PM
9/16/2010	3:31:49 PM	Helium valve closed
9/16/2010	3:31:49 PM	H2 valve closed
9/16/2010	3:31:49 PM	BCl3 valve closed
9/16/2010	3:31:49 PM	PH3 valve closed
9/16/2010	3:31:49 PM	SiCl4 pre valve closed
9/16/2010	3:31:49 PM	SiCl4 post valve closed
9/16/2010	3:31:49 PM	Main Vac valve closed
9/16/2010	3:31:49 PM	Bubbler valve closed
9/16/2010	3:31:49 PM	Bypass valve opened
9/16/2010	3:31:49 PM	Helium MFC set to  0.000000
9/16/2010	3:31:49 PM	H2 MFC set to  0.000000
9/16/2010	3:31:49 PM	BCl3 MFC set to  0.000000
9/16/2010	3:31:49 PM	PHl3 MFC set to  0.000000
9/16/2010	3:31:49 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:31:49 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:31:49 PM	Tube furnace set to 0
9/16/2010	3:31:49 PM	Helium valve closed
9/16/2010	3:31:49 PM	H2 valve closed
9/16/2010	3:31:49 PM	BCl3 valve closed
9/16/2010	3:31:49 PM	PH3 valve closed
9/16/2010	3:31:49 PM	SiCl4 pre valve closed
9/16/2010	3:31:49 PM	SiCl4 post valve closed
9/16/2010	3:31:49 PM	Bubbler valve closed
9/16/2010	3:31:49 PM	Main Vac valve opened
9/16/2010	3:31:49 PM	Bypass valve opened
9/16/2010	3:31:49 PM	Helium MFC set to  0.000000
9/16/2010	3:31:49 PM	H2 MFC set to  0.000000
9/16/2010	3:31:49 PM	BCl3 MFC set to  0.000000
9/16/2010	3:31:49 PM	PHl3 MFC set to  0.000000
9/16/2010	3:31:49 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:31:49 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:31:50 PM	Tube furnace set to 0
9/16/2010	3:31:58 PM	H2 valve closed
9/16/2010	3:31:58 PM	BCl3 valve closed
9/16/2010	3:31:58 PM	PH3 valve closed
9/16/2010	3:31:58 PM	SiCl4 pre valve closed
9/16/2010	3:31:58 PM	SiCl4 post valve closed
9/16/2010	3:31:58 PM	Bubbler valve closed
9/16/2010	3:31:58 PM	Helium valve opened
9/16/2010	3:31:58 PM	Main Vac valve opened
9/16/2010	3:31:58 PM	Bypass valve opened
9/16/2010	3:31:58 PM	Helium MFC set to  100.000000
9/16/2010	3:31:58 PM	H2 MFC set to  0.000000
9/16/2010	3:31:58 PM	BCl3 MFC set to  0.000000
9/16/2010	3:31:58 PM	PHl3 MFC set to  0.000000
9/16/2010	3:31:58 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:31:58 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:31:59 PM	Tube furnace set to 0
9/16/2010	3:32:59 PM	Helium valve closed
9/16/2010	3:32:59 PM	H2 valve closed
9/16/2010	3:32:59 PM	BCl3 valve closed
9/16/2010	3:32:59 PM	PH3 valve closed
9/16/2010	3:32:59 PM	SiCl4 pre valve closed
9/16/2010	3:32:59 PM	SiCl4 post valve closed
9/16/2010	3:32:59 PM	Bubbler valve closed
9/16/2010	3:32:59 PM	Main Vac valve opened
9/16/2010	3:32:59 PM	Bypass valve opened
9/16/2010	3:32:59 PM	Helium MFC set to  0.000000
9/16/2010	3:32:59 PM	H2 MFC set to  0.000000
9/16/2010	3:32:59 PM	BCl3 MFC set to  0.000000
9/16/2010	3:32:59 PM	PHl3 MFC set to  0.000000
9/16/2010	3:32:59 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:32:59 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:32:59 PM	Tube furnace set to 0
9/16/2010	3:33:59 PM	H2 valve closed
9/16/2010	3:33:59 PM	BCl3 valve closed
9/16/2010	3:33:59 PM	PH3 valve closed
9/16/2010	3:33:59 PM	SiCl4 pre valve closed
9/16/2010	3:33:59 PM	SiCl4 post valve closed
9/16/2010	3:33:59 PM	Bubbler valve closed
9/16/2010	3:33:59 PM	Helium valve opened
9/16/2010	3:33:59 PM	Main Vac valve opened
9/16/2010	3:33:59 PM	Bypass valve opened
9/16/2010	3:33:59 PM	Helium MFC set to  100.000000
9/16/2010	3:33:59 PM	H2 MFC set to  0.000000
9/16/2010	3:33:59 PM	BCl3 MFC set to  0.000000
9/16/2010	3:33:59 PM	PHl3 MFC set to  0.000000
9/16/2010	3:33:59 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:33:59 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:33:59 PM	Tube furnace set to 0
9/16/2010	3:34:59 PM	Helium valve closed
9/16/2010	3:34:59 PM	H2 valve closed
9/16/2010	3:34:59 PM	BCl3 valve closed
9/16/2010	3:34:59 PM	PH3 valve closed
9/16/2010	3:34:59 PM	SiCl4 pre valve closed
9/16/2010	3:34:59 PM	SiCl4 post valve closed
9/16/2010	3:34:59 PM	Bubbler valve closed
9/16/2010	3:34:59 PM	Main Vac valve opened
9/16/2010	3:34:59 PM	Bypass valve opened
9/16/2010	3:34:59 PM	Helium MFC set to  0.000000
9/16/2010	3:34:59 PM	H2 MFC set to  0.000000
9/16/2010	3:34:59 PM	BCl3 MFC set to  0.000000
9/16/2010	3:34:59 PM	PHl3 MFC set to  0.000000
9/16/2010	3:34:59 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:34:59 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:34:59 PM	Tube furnace set to 0
9/16/2010	3:35:59 PM	H2 valve closed
9/16/2010	3:35:59 PM	BCl3 valve closed
9/16/2010	3:35:59 PM	PH3 valve closed
9/16/2010	3:35:59 PM	SiCl4 pre valve closed
9/16/2010	3:35:59 PM	SiCl4 post valve closed
9/16/2010	3:35:59 PM	Bubbler valve closed
9/16/2010	3:35:59 PM	Helium valve opened
9/16/2010	3:35:59 PM	Main Vac valve opened
9/16/2010	3:35:59 PM	Bypass valve opened
9/16/2010	3:35:59 PM	Helium MFC set to  100.000000
9/16/2010	3:35:59 PM	H2 MFC set to  0.000000
9/16/2010	3:35:59 PM	BCl3 MFC set to  0.000000
9/16/2010	3:35:59 PM	PHl3 MFC set to  0.000000
9/16/2010	3:35:59 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:35:59 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:35:59 PM	Tube furnace set to 0
9/16/2010	3:36:59 PM	Helium valve closed
9/16/2010	3:36:59 PM	H2 valve closed
9/16/2010	3:36:59 PM	BCl3 valve closed
9/16/2010	3:36:59 PM	PH3 valve closed
9/16/2010	3:36:59 PM	SiCl4 pre valve closed
9/16/2010	3:36:59 PM	SiCl4 post valve closed
9/16/2010	3:36:59 PM	Bubbler valve closed
9/16/2010	3:36:59 PM	Main Vac valve opened
9/16/2010	3:36:59 PM	Bypass valve opened
9/16/2010	3:36:59 PM	Helium MFC set to  0.000000
9/16/2010	3:36:59 PM	H2 MFC set to  0.000000
9/16/2010	3:36:59 PM	BCl3 MFC set to  0.000000
9/16/2010	3:36:59 PM	PHl3 MFC set to  0.000000
9/16/2010	3:36:59 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:36:59 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:37:00 PM	Tube furnace set to 0
9/16/2010	3:38:00 PM	H2 valve closed
9/16/2010	3:38:00 PM	BCl3 valve closed
9/16/2010	3:38:00 PM	PH3 valve closed
9/16/2010	3:38:00 PM	SiCl4 pre valve closed
9/16/2010	3:38:00 PM	SiCl4 post valve closed
9/16/2010	3:38:00 PM	Bubbler valve closed
9/16/2010	3:38:00 PM	Helium valve opened
9/16/2010	3:38:00 PM	Main Vac valve opened
9/16/2010	3:38:00 PM	Bypass valve opened
9/16/2010	3:38:00 PM	Helium MFC set to  100.000000
9/16/2010	3:38:00 PM	H2 MFC set to  0.000000
9/16/2010	3:38:00 PM	BCl3 MFC set to  0.000000
9/16/2010	3:38:00 PM	PHl3 MFC set to  0.000000
9/16/2010	3:38:00 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:38:00 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:38:00 PM	Tube furnace set to 0
9/16/2010	3:39:00 PM	Helium valve closed
9/16/2010	3:39:00 PM	H2 valve closed
9/16/2010	3:39:00 PM	BCl3 valve closed
9/16/2010	3:39:00 PM	PH3 valve closed
9/16/2010	3:39:00 PM	SiCl4 pre valve closed
9/16/2010	3:39:00 PM	SiCl4 post valve closed
9/16/2010	3:39:00 PM	Bubbler valve closed
9/16/2010	3:39:00 PM	Main Vac valve opened
9/16/2010	3:39:00 PM	Bypass valve opened
9/16/2010	3:39:00 PM	Helium MFC set to  0.000000
9/16/2010	3:39:00 PM	H2 MFC set to  0.000000
9/16/2010	3:39:00 PM	BCl3 MFC set to  0.000000
9/16/2010	3:39:00 PM	PHl3 MFC set to  0.000000
9/16/2010	3:39:00 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:39:00 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:39:00 PM	Tube furnace set to 0
9/16/2010	3:40:00 PM	H2 valve closed
9/16/2010	3:40:00 PM	BCl3 valve closed
9/16/2010	3:40:00 PM	PH3 valve closed
9/16/2010	3:40:00 PM	SiCl4 pre valve closed
9/16/2010	3:40:00 PM	SiCl4 post valve closed
9/16/2010	3:40:00 PM	Bubbler valve closed
9/16/2010	3:40:00 PM	Helium valve opened
9/16/2010	3:40:00 PM	Main Vac valve opened
9/16/2010	3:40:00 PM	Bypass valve opened
9/16/2010	3:40:00 PM	Helium MFC set to  100.000000
9/16/2010	3:40:00 PM	H2 MFC set to  0.000000
9/16/2010	3:40:00 PM	BCl3 MFC set to  0.000000
9/16/2010	3:40:00 PM	PHl3 MFC set to  0.000000
9/16/2010	3:40:00 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:40:00 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:40:00 PM	Tube furnace set to 0
9/16/2010	3:41:00 PM	Helium valve closed
9/16/2010	3:41:00 PM	H2 valve closed
9/16/2010	3:41:00 PM	BCl3 valve closed
9/16/2010	3:41:00 PM	PH3 valve closed
9/16/2010	3:41:00 PM	SiCl4 pre valve closed
9/16/2010	3:41:00 PM	SiCl4 post valve closed
9/16/2010	3:41:00 PM	Bubbler valve closed
9/16/2010	3:41:00 PM	Main Vac valve opened
9/16/2010	3:41:00 PM	Bypass valve opened
9/16/2010	3:41:00 PM	Helium MFC set to  0.000000
9/16/2010	3:41:00 PM	H2 MFC set to  0.000000
9/16/2010	3:41:00 PM	BCl3 MFC set to  0.000000
9/16/2010	3:41:00 PM	PHl3 MFC set to  0.000000
9/16/2010	3:41:00 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:41:00 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:41:00 PM	Tube furnace set to 0
9/16/2010	3:42:00 PM	H2 valve closed
9/16/2010	3:42:00 PM	BCl3 valve closed
9/16/2010	3:42:00 PM	PH3 valve closed
9/16/2010	3:42:00 PM	SiCl4 pre valve closed
9/16/2010	3:42:00 PM	SiCl4 post valve closed
9/16/2010	3:42:00 PM	Bubbler valve closed
9/16/2010	3:42:00 PM	Helium valve opened
9/16/2010	3:42:00 PM	Main Vac valve opened
9/16/2010	3:42:00 PM	Bypass valve opened
9/16/2010	3:42:00 PM	Helium MFC set to  100.000000
9/16/2010	3:42:00 PM	H2 MFC set to  0.000000
9/16/2010	3:42:00 PM	BCl3 MFC set to  0.000000
9/16/2010	3:42:00 PM	PHl3 MFC set to  0.000000
9/16/2010	3:42:00 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:42:00 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:42:01 PM	Tube furnace set to 0
9/16/2010	3:43:01 PM	Helium valve closed
9/16/2010	3:43:01 PM	H2 valve closed
9/16/2010	3:43:01 PM	BCl3 valve closed
9/16/2010	3:43:01 PM	PH3 valve closed
9/16/2010	3:43:01 PM	SiCl4 pre valve closed
9/16/2010	3:43:01 PM	SiCl4 post valve closed
9/16/2010	3:43:01 PM	Bubbler valve closed
9/16/2010	3:43:01 PM	Main Vac valve opened
9/16/2010	3:43:01 PM	Bypass valve opened
9/16/2010	3:43:01 PM	Helium MFC set to  0.000000
9/16/2010	3:43:01 PM	H2 MFC set to  0.000000
9/16/2010	3:43:01 PM	BCl3 MFC set to  0.000000
9/16/2010	3:43:01 PM	PHl3 MFC set to  0.000000
9/16/2010	3:43:01 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:43:01 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:43:01 PM	Tube furnace set to 0
9/16/2010	3:44:01 PM	H2 valve closed
9/16/2010	3:44:01 PM	BCl3 valve closed
9/16/2010	3:44:01 PM	PH3 valve closed
9/16/2010	3:44:01 PM	SiCl4 pre valve closed
9/16/2010	3:44:01 PM	SiCl4 post valve closed
9/16/2010	3:44:01 PM	Bubbler valve closed
9/16/2010	3:44:01 PM	Helium valve opened
9/16/2010	3:44:01 PM	Main Vac valve opened
9/16/2010	3:44:01 PM	Bypass valve opened
9/16/2010	3:44:01 PM	Helium MFC set to  100.000000
9/16/2010	3:44:01 PM	H2 MFC set to  0.000000
9/16/2010	3:44:01 PM	BCl3 MFC set to  0.000000
9/16/2010	3:44:01 PM	PHl3 MFC set to  0.000000
9/16/2010	3:44:01 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:44:01 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:44:01 PM	Tube furnace set to 0
9/16/2010	3:45:01 PM	Helium valve closed
9/16/2010	3:45:01 PM	H2 valve closed
9/16/2010	3:45:01 PM	BCl3 valve closed
9/16/2010	3:45:01 PM	PH3 valve closed
9/16/2010	3:45:01 PM	SiCl4 pre valve closed
9/16/2010	3:45:01 PM	SiCl4 post valve closed
9/16/2010	3:45:01 PM	Bubbler valve closed
9/16/2010	3:45:01 PM	Main Vac valve opened
9/16/2010	3:45:01 PM	Bypass valve opened
9/16/2010	3:45:01 PM	Helium MFC set to  0.000000
9/16/2010	3:45:01 PM	H2 MFC set to  0.000000
9/16/2010	3:45:01 PM	BCl3 MFC set to  0.000000
9/16/2010	3:45:01 PM	PHl3 MFC set to  0.000000
9/16/2010	3:45:01 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:45:01 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:45:01 PM	Tube furnace set to 0
9/16/2010	3:46:01 PM	H2 valve closed
9/16/2010	3:46:01 PM	BCl3 valve closed
9/16/2010	3:46:01 PM	PH3 valve closed
9/16/2010	3:46:01 PM	SiCl4 pre valve closed
9/16/2010	3:46:01 PM	SiCl4 post valve closed
9/16/2010	3:46:01 PM	Bubbler valve closed
9/16/2010	3:46:01 PM	Helium valve opened
9/16/2010	3:46:01 PM	Main Vac valve opened
9/16/2010	3:46:01 PM	Bypass valve opened
9/16/2010	3:46:01 PM	Helium MFC set to  100.000000
9/16/2010	3:46:01 PM	H2 MFC set to  0.000000
9/16/2010	3:46:01 PM	BCl3 MFC set to  0.000000
9/16/2010	3:46:01 PM	PHl3 MFC set to  0.000000
9/16/2010	3:46:01 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:46:01 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:46:01 PM	Tube furnace set to 0
9/16/2010	3:47:02 PM	Helium valve closed
9/16/2010	3:47:02 PM	H2 valve closed
9/16/2010	3:47:02 PM	BCl3 valve closed
9/16/2010	3:47:02 PM	PH3 valve closed
9/16/2010	3:47:02 PM	SiCl4 pre valve closed
9/16/2010	3:47:02 PM	SiCl4 post valve closed
9/16/2010	3:47:02 PM	Bubbler valve closed
9/16/2010	3:47:02 PM	Main Vac valve opened
9/16/2010	3:47:02 PM	Bypass valve opened
9/16/2010	3:47:02 PM	Helium MFC set to  0.000000
9/16/2010	3:47:02 PM	H2 MFC set to  0.000000
9/16/2010	3:47:02 PM	BCl3 MFC set to  0.000000
9/16/2010	3:47:02 PM	PHl3 MFC set to  0.000000
9/16/2010	3:47:02 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:47:02 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:47:02 PM	Tube furnace set to 0
9/16/2010	3:48:02 PM	H2 valve closed
9/16/2010	3:48:02 PM	BCl3 valve closed
9/16/2010	3:48:02 PM	PH3 valve closed
9/16/2010	3:48:02 PM	SiCl4 pre valve closed
9/16/2010	3:48:02 PM	SiCl4 post valve closed
9/16/2010	3:48:02 PM	Bubbler valve closed
9/16/2010	3:48:02 PM	Helium valve opened
9/16/2010	3:48:02 PM	Main Vac valve opened
9/16/2010	3:48:02 PM	Bypass valve opened
9/16/2010	3:48:02 PM	Helium MFC set to  100.000000
9/16/2010	3:48:02 PM	H2 MFC set to  0.000000
9/16/2010	3:48:02 PM	BCl3 MFC set to  0.000000
9/16/2010	3:48:02 PM	PHl3 MFC set to  0.000000
9/16/2010	3:48:02 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:48:02 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:48:02 PM	Tube furnace set to 0
9/16/2010	3:49:02 PM	Helium valve closed
9/16/2010	3:49:02 PM	H2 valve closed
9/16/2010	3:49:02 PM	BCl3 valve closed
9/16/2010	3:49:02 PM	PH3 valve closed
9/16/2010	3:49:02 PM	SiCl4 pre valve closed
9/16/2010	3:49:02 PM	SiCl4 post valve closed
9/16/2010	3:49:02 PM	Bubbler valve closed
9/16/2010	3:49:02 PM	Main Vac valve opened
9/16/2010	3:49:02 PM	Bypass valve opened
9/16/2010	3:49:02 PM	Helium MFC set to  0.000000
9/16/2010	3:49:02 PM	H2 MFC set to  0.000000
9/16/2010	3:49:02 PM	BCl3 MFC set to  0.000000
9/16/2010	3:49:02 PM	PHl3 MFC set to  0.000000
9/16/2010	3:49:02 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:49:02 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:49:02 PM	Tube furnace set to 0
9/16/2010	3:50:02 PM	H2 valve closed
9/16/2010	3:50:02 PM	BCl3 valve closed
9/16/2010	3:50:02 PM	PH3 valve closed
9/16/2010	3:50:02 PM	SiCl4 pre valve closed
9/16/2010	3:50:02 PM	SiCl4 post valve closed
9/16/2010	3:50:02 PM	Bubbler valve closed
9/16/2010	3:50:02 PM	Helium valve opened
9/16/2010	3:50:02 PM	Main Vac valve opened
9/16/2010	3:50:02 PM	Bypass valve opened
9/16/2010	3:50:02 PM	Helium MFC set to  100.000000
9/16/2010	3:50:02 PM	H2 MFC set to  0.000000
9/16/2010	3:50:02 PM	BCl3 MFC set to  0.000000
9/16/2010	3:50:02 PM	PHl3 MFC set to  0.000000
9/16/2010	3:50:02 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:50:02 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:50:02 PM	Tube furnace set to 0
9/16/2010	3:51:02 PM	Helium valve closed
9/16/2010	3:51:02 PM	H2 valve closed
9/16/2010	3:51:02 PM	BCl3 valve closed
9/16/2010	3:51:02 PM	PH3 valve closed
9/16/2010	3:51:02 PM	SiCl4 pre valve closed
9/16/2010	3:51:02 PM	SiCl4 post valve closed
9/16/2010	3:51:02 PM	Bubbler valve closed
9/16/2010	3:51:02 PM	Main Vac valve opened
9/16/2010	3:51:02 PM	Bypass valve opened
9/16/2010	3:51:02 PM	Helium MFC set to  0.000000
9/16/2010	3:51:02 PM	H2 MFC set to  0.000000
9/16/2010	3:51:02 PM	BCl3 MFC set to  0.000000
9/16/2010	3:51:02 PM	PHl3 MFC set to  0.000000
9/16/2010	3:51:02 PM	SiCl4 MFC set to  0.000000
9/16/2010	3:51:02 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	3:51:02 PM	Tube furnace set to 0
9/16/2010	3:51:03 PM	Run finished at 3:51 PM
9/16/2010	3:51:04 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/16/2010	4:37:41 PM	Bypass valve closed
9/16/2010	4:37:42 PM	Main Vac valve closed
9/16/2010	4:37:46 PM	Main Vac valve opened
9/16/2010	4:37:46 PM	Bypass valve opened
9/16/2010	4:38:45 PM	Recipe started at 4:38 PM
9/16/2010	4:38:45 PM	Helium valve closed
9/16/2010	4:38:45 PM	BCl3 valve closed
9/16/2010	4:38:45 PM	PH3 valve closed
9/16/2010	4:38:45 PM	SiCl4 pre valve closed
9/16/2010	4:38:45 PM	SiCl4 post valve closed
9/16/2010	4:38:45 PM	Main Vac valve closed
9/16/2010	4:38:45 PM	Bypass valve closed
9/16/2010	4:38:45 PM	Bubbler valve closed
9/16/2010	4:38:45 PM	H2 valve opened
9/16/2010	4:38:45 PM	Helium MFC set to  0.000000
9/16/2010	4:38:45 PM	H2 MFC set to  500.000000
9/16/2010	4:38:45 PM	BCl3 MFC set to  0.000000
9/16/2010	4:38:45 PM	PHl3 MFC set to  0.000000
9/16/2010	4:38:45 PM	SiCl4 MFC set to  0.000000
9/16/2010	4:38:45 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	4:38:45 PM	Tube furnace set to 0
9/16/2010	4:39:53 PM	Run aborted at 4:39 PM
9/16/2010	4:39:53 PM	Helium valve closed
9/16/2010	4:39:53 PM	H2 valve closed
9/16/2010	4:39:53 PM	BCl3 valve closed
9/16/2010	4:39:53 PM	PH3 valve closed
9/16/2010	4:39:53 PM	SiCl4 pre valve closed
9/16/2010	4:39:53 PM	SiCl4 post valve closed
9/16/2010	4:39:53 PM	Bypass valve closed
9/16/2010	4:39:53 PM	Main Vac valve closed
9/16/2010	4:39:53 PM	Bubbler valve closed
9/16/2010	4:39:53 PM	Helium MFC set to  0.000000
9/16/2010	4:39:53 PM	H2 MFC set to  0.000000
9/16/2010	4:39:53 PM	BCl3 MFC set to  0.000000
9/16/2010	4:39:53 PM	PHl3 MFC set to  0.000000
9/16/2010	4:39:53 PM	SiCl4 MFC set to  0.000000
9/16/2010	4:39:53 PM	Tube furnace set to 0
9/16/2010	4:40:06 PM	Recipe started at 4:40 PM
9/16/2010	4:40:06 PM	Helium valve closed
9/16/2010	4:40:06 PM	BCl3 valve closed
9/16/2010	4:40:06 PM	PH3 valve closed
9/16/2010	4:40:06 PM	SiCl4 pre valve closed
9/16/2010	4:40:06 PM	SiCl4 post valve closed
9/16/2010	4:40:06 PM	Main Vac valve closed
9/16/2010	4:40:06 PM	Bypass valve closed
9/16/2010	4:40:06 PM	Bubbler valve closed
9/16/2010	4:40:06 PM	H2 valve opened
9/16/2010	4:40:06 PM	Helium MFC set to  0.000000
9/16/2010	4:40:06 PM	H2 MFC set to  500.000000
9/16/2010	4:40:06 PM	BCl3 MFC set to  0.000000
9/16/2010	4:40:06 PM	PHl3 MFC set to  0.000000
9/16/2010	4:40:06 PM	SiCl4 MFC set to  0.000000
9/16/2010	4:40:06 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	4:40:06 PM	Tube furnace set to 0
9/16/2010	4:40:18 PM	Helium valve closed
9/16/2010	4:40:18 PM	BCl3 valve closed
9/16/2010	4:40:18 PM	PH3 valve closed
9/16/2010	4:40:18 PM	SiCl4 pre valve closed
9/16/2010	4:40:18 PM	SiCl4 post valve closed
9/16/2010	4:40:18 PM	Main Vac valve closed
9/16/2010	4:40:18 PM	Bypass valve closed
9/16/2010	4:40:18 PM	H2 valve opened
9/16/2010	4:40:18 PM	Bubbler valve opened
9/16/2010	4:40:18 PM	Helium MFC set to  0.000000
9/16/2010	4:40:18 PM	H2 MFC set to  500.000000
9/16/2010	4:40:18 PM	BCl3 MFC set to  0.000000
9/16/2010	4:40:18 PM	PHl3 MFC set to  0.000000
9/16/2010	4:40:18 PM	SiCl4 MFC set to  0.000000
9/16/2010	4:40:18 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	4:40:18 PM	Tube furnace set to 1000
9/16/2010	4:48:46 PM	Helium valve closed
9/16/2010	4:48:46 PM	PH3 valve closed
9/16/2010	4:48:46 PM	Main Vac valve closed
9/16/2010	4:48:46 PM	Bypass valve closed
9/16/2010	4:48:46 PM	H2 valve opened
9/16/2010	4:48:46 PM	BCl3 valve opened
9/16/2010	4:48:46 PM	SiCl4 pre valve opened
9/16/2010	4:48:46 PM	SiCl4 post valve opened
9/16/2010	4:48:46 PM	Bubbler valve opened
9/16/2010	4:48:46 PM	Helium MFC set to  0.000000
9/16/2010	4:48:46 PM	H2 MFC set to  500.000000
9/16/2010	4:48:46 PM	BCl3 MFC set to  29.000000
9/16/2010	4:48:46 PM	PHl3 MFC set to  0.000000
9/16/2010	4:48:46 PM	SiCl4 MFC set to  50.000000
9/16/2010	4:48:46 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	4:48:46 PM	Tube furnace set to 1000
9/16/2010	4:52:02 PM	Helium valve closed
9/16/2010	4:52:02 PM	PH3 valve closed
9/16/2010	4:52:02 PM	Main Vac valve closed
9/16/2010	4:52:02 PM	Bypass valve closed
9/16/2010	4:52:02 PM	H2 valve opened
9/16/2010	4:52:02 PM	BCl3 valve opened
9/16/2010	4:52:02 PM	SiCl4 pre valve opened
9/16/2010	4:52:02 PM	SiCl4 post valve opened
9/16/2010	4:52:02 PM	Bubbler valve opened
9/16/2010	4:52:02 PM	Helium MFC set to  0.000000
9/16/2010	4:52:02 PM	H2 MFC set to  500.000000
9/16/2010	4:52:02 PM	BCl3 MFC set to  29.000000
9/16/2010	4:52:02 PM	PHl3 MFC set to  0.000000
9/16/2010	4:52:02 PM	SiCl4 MFC set to  50.000000
9/16/2010	4:52:02 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	4:52:03 PM	Tube furnace set to 1000
9/16/2010	4:57:03 PM	H2 valve closed
9/16/2010	4:57:03 PM	BCl3 valve closed
9/16/2010	4:57:03 PM	PH3 valve closed
9/16/2010	4:57:03 PM	SiCl4 pre valve closed
9/16/2010	4:57:03 PM	SiCl4 post valve closed
9/16/2010	4:57:03 PM	Main Vac valve closed
9/16/2010	4:57:03 PM	Bypass valve closed
9/16/2010	4:57:03 PM	Helium valve opened
9/16/2010	4:57:03 PM	Bubbler valve opened
9/16/2010	4:57:03 PM	Helium MFC set to  500.000000
9/16/2010	4:57:03 PM	H2 MFC set to  0.000000
9/16/2010	4:57:03 PM	BCl3 MFC set to  0.000000
9/16/2010	4:57:03 PM	PHl3 MFC set to  0.000000
9/16/2010	4:57:03 PM	SiCl4 MFC set to  0.000000
9/16/2010	4:57:03 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	4:57:03 PM	Tube furnace set to 0
9/16/2010	5:17:03 PM	Helium valve closed
9/16/2010	5:17:03 PM	H2 valve closed
9/16/2010	5:17:03 PM	BCl3 valve closed
9/16/2010	5:17:03 PM	PH3 valve closed
9/16/2010	5:17:03 PM	SiCl4 pre valve closed
9/16/2010	5:17:03 PM	SiCl4 post valve closed
9/16/2010	5:17:03 PM	Main Vac valve closed
9/16/2010	5:17:03 PM	Bypass valve closed
9/16/2010	5:17:03 PM	Bubbler valve closed
9/16/2010	5:17:03 PM	Helium MFC set to  0.000000
9/16/2010	5:17:03 PM	H2 MFC set to  0.000000
9/16/2010	5:17:03 PM	BCl3 MFC set to  0.000000
9/16/2010	5:17:03 PM	PHl3 MFC set to  0.000000
9/16/2010	5:17:03 PM	SiCl4 MFC set to  0.000000
9/16/2010	5:17:03 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	5:17:03 PM	Tube furnace set to 0
9/16/2010	5:17:03 PM	Run finished at 5:17 PM
9/16/2010	6:31:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/16/2010	6:31:15 PM	Recipe started at 6:31 PM
9/16/2010	6:31:15 PM	Helium valve closed
9/16/2010	6:31:15 PM	H2 valve closed
9/16/2010	6:31:15 PM	BCl3 valve closed
9/16/2010	6:31:15 PM	PH3 valve closed
9/16/2010	6:31:15 PM	SiCl4 pre valve closed
9/16/2010	6:31:15 PM	SiCl4 post valve closed
9/16/2010	6:31:15 PM	Main Vac valve closed
9/16/2010	6:31:15 PM	Bubbler valve closed
9/16/2010	6:31:15 PM	Bypass valve opened
9/16/2010	6:31:15 PM	Helium MFC set to  0.000000
9/16/2010	6:31:15 PM	H2 MFC set to  0.000000
9/16/2010	6:31:15 PM	BCl3 MFC set to  0.000000
9/16/2010	6:31:15 PM	PHl3 MFC set to  0.000000
9/16/2010	6:31:15 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:31:15 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:31:15 PM	Tube furnace set to 0
9/16/2010	6:31:59 PM	Helium valve closed
9/16/2010	6:31:59 PM	H2 valve closed
9/16/2010	6:31:59 PM	BCl3 valve closed
9/16/2010	6:31:59 PM	PH3 valve closed
9/16/2010	6:31:59 PM	SiCl4 pre valve closed
9/16/2010	6:31:59 PM	SiCl4 post valve closed
9/16/2010	6:31:59 PM	Bubbler valve closed
9/16/2010	6:31:59 PM	Main Vac valve opened
9/16/2010	6:31:59 PM	Bypass valve opened
9/16/2010	6:31:59 PM	Helium MFC set to  0.000000
9/16/2010	6:31:59 PM	H2 MFC set to  0.000000
9/16/2010	6:31:59 PM	BCl3 MFC set to  0.000000
9/16/2010	6:31:59 PM	PHl3 MFC set to  0.000000
9/16/2010	6:31:59 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:31:59 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:31:59 PM	Tube furnace set to 0
9/16/2010	6:31:59 PM	Run finished at 6:31 PM
9/16/2010	6:31:59 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/16/2010	6:44:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/16/2010	6:44:56 PM	Recipe started at 6:44 PM
9/16/2010	6:44:56 PM	Helium valve closed
9/16/2010	6:44:56 PM	H2 valve closed
9/16/2010	6:44:56 PM	BCl3 valve closed
9/16/2010	6:44:56 PM	PH3 valve closed
9/16/2010	6:44:56 PM	SiCl4 pre valve closed
9/16/2010	6:44:56 PM	SiCl4 post valve closed
9/16/2010	6:44:56 PM	Main Vac valve closed
9/16/2010	6:44:56 PM	Bubbler valve closed
9/16/2010	6:44:56 PM	Bypass valve opened
9/16/2010	6:44:56 PM	Helium MFC set to  0.000000
9/16/2010	6:44:56 PM	H2 MFC set to  0.000000
9/16/2010	6:44:56 PM	BCl3 MFC set to  0.000000
9/16/2010	6:44:56 PM	PHl3 MFC set to  0.000000
9/16/2010	6:44:56 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:44:56 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:44:56 PM	Tube furnace set to 0
9/16/2010	6:44:56 PM	Helium valve closed
9/16/2010	6:44:56 PM	H2 valve closed
9/16/2010	6:44:56 PM	BCl3 valve closed
9/16/2010	6:44:56 PM	PH3 valve closed
9/16/2010	6:44:56 PM	SiCl4 pre valve closed
9/16/2010	6:44:56 PM	SiCl4 post valve closed
9/16/2010	6:44:56 PM	Bubbler valve closed
9/16/2010	6:44:56 PM	Main Vac valve opened
9/16/2010	6:44:56 PM	Bypass valve opened
9/16/2010	6:44:56 PM	Helium MFC set to  0.000000
9/16/2010	6:44:56 PM	H2 MFC set to  0.000000
9/16/2010	6:44:56 PM	BCl3 MFC set to  0.000000
9/16/2010	6:44:56 PM	PHl3 MFC set to  0.000000
9/16/2010	6:44:56 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:44:56 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:44:56 PM	Tube furnace set to 0
9/16/2010	6:45:56 PM	H2 valve closed
9/16/2010	6:45:56 PM	BCl3 valve closed
9/16/2010	6:45:56 PM	PH3 valve closed
9/16/2010	6:45:56 PM	SiCl4 pre valve closed
9/16/2010	6:45:56 PM	SiCl4 post valve closed
9/16/2010	6:45:56 PM	Bubbler valve closed
9/16/2010	6:45:56 PM	Helium valve opened
9/16/2010	6:45:56 PM	Main Vac valve opened
9/16/2010	6:45:56 PM	Bypass valve opened
9/16/2010	6:45:56 PM	Helium MFC set to  100.000000
9/16/2010	6:45:56 PM	H2 MFC set to  0.000000
9/16/2010	6:45:56 PM	BCl3 MFC set to  0.000000
9/16/2010	6:45:56 PM	PHl3 MFC set to  0.000000
9/16/2010	6:45:56 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:45:56 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:45:56 PM	Tube furnace set to 0
9/16/2010	6:46:56 PM	Helium valve closed
9/16/2010	6:46:56 PM	H2 valve closed
9/16/2010	6:46:56 PM	BCl3 valve closed
9/16/2010	6:46:56 PM	PH3 valve closed
9/16/2010	6:46:56 PM	SiCl4 pre valve closed
9/16/2010	6:46:56 PM	SiCl4 post valve closed
9/16/2010	6:46:56 PM	Bubbler valve closed
9/16/2010	6:46:56 PM	Main Vac valve opened
9/16/2010	6:46:56 PM	Bypass valve opened
9/16/2010	6:46:56 PM	Helium MFC set to  0.000000
9/16/2010	6:46:56 PM	H2 MFC set to  0.000000
9/16/2010	6:46:56 PM	BCl3 MFC set to  0.000000
9/16/2010	6:46:56 PM	PHl3 MFC set to  0.000000
9/16/2010	6:46:56 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:46:56 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:46:57 PM	Tube furnace set to 0
9/16/2010	6:47:57 PM	H2 valve closed
9/16/2010	6:47:57 PM	BCl3 valve closed
9/16/2010	6:47:57 PM	PH3 valve closed
9/16/2010	6:47:57 PM	SiCl4 pre valve closed
9/16/2010	6:47:57 PM	SiCl4 post valve closed
9/16/2010	6:47:57 PM	Bubbler valve closed
9/16/2010	6:47:57 PM	Helium valve opened
9/16/2010	6:47:57 PM	Main Vac valve opened
9/16/2010	6:47:57 PM	Bypass valve opened
9/16/2010	6:47:57 PM	Helium MFC set to  100.000000
9/16/2010	6:47:57 PM	H2 MFC set to  0.000000
9/16/2010	6:47:57 PM	BCl3 MFC set to  0.000000
9/16/2010	6:47:57 PM	PHl3 MFC set to  0.000000
9/16/2010	6:47:57 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:47:57 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:47:57 PM	Tube furnace set to 0
9/16/2010	6:48:57 PM	Helium valve closed
9/16/2010	6:48:57 PM	H2 valve closed
9/16/2010	6:48:57 PM	BCl3 valve closed
9/16/2010	6:48:57 PM	PH3 valve closed
9/16/2010	6:48:57 PM	SiCl4 pre valve closed
9/16/2010	6:48:57 PM	SiCl4 post valve closed
9/16/2010	6:48:57 PM	Bubbler valve closed
9/16/2010	6:48:57 PM	Main Vac valve opened
9/16/2010	6:48:57 PM	Bypass valve opened
9/16/2010	6:48:57 PM	Helium MFC set to  0.000000
9/16/2010	6:48:57 PM	H2 MFC set to  0.000000
9/16/2010	6:48:57 PM	BCl3 MFC set to  0.000000
9/16/2010	6:48:57 PM	PHl3 MFC set to  0.000000
9/16/2010	6:48:57 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:48:57 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:48:57 PM	Tube furnace set to 0
9/16/2010	6:49:57 PM	H2 valve closed
9/16/2010	6:49:57 PM	BCl3 valve closed
9/16/2010	6:49:57 PM	PH3 valve closed
9/16/2010	6:49:57 PM	SiCl4 pre valve closed
9/16/2010	6:49:57 PM	SiCl4 post valve closed
9/16/2010	6:49:57 PM	Bubbler valve closed
9/16/2010	6:49:57 PM	Helium valve opened
9/16/2010	6:49:57 PM	Main Vac valve opened
9/16/2010	6:49:57 PM	Bypass valve opened
9/16/2010	6:49:57 PM	Helium MFC set to  100.000000
9/16/2010	6:49:57 PM	H2 MFC set to  0.000000
9/16/2010	6:49:57 PM	BCl3 MFC set to  0.000000
9/16/2010	6:49:57 PM	PHl3 MFC set to  0.000000
9/16/2010	6:49:57 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:49:57 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:49:57 PM	Tube furnace set to 0
9/16/2010	6:50:57 PM	Helium valve closed
9/16/2010	6:50:57 PM	H2 valve closed
9/16/2010	6:50:57 PM	BCl3 valve closed
9/16/2010	6:50:57 PM	PH3 valve closed
9/16/2010	6:50:57 PM	SiCl4 pre valve closed
9/16/2010	6:50:57 PM	SiCl4 post valve closed
9/16/2010	6:50:57 PM	Bubbler valve closed
9/16/2010	6:50:57 PM	Main Vac valve opened
9/16/2010	6:50:57 PM	Bypass valve opened
9/16/2010	6:50:57 PM	Helium MFC set to  0.000000
9/16/2010	6:50:57 PM	H2 MFC set to  0.000000
9/16/2010	6:50:57 PM	BCl3 MFC set to  0.000000
9/16/2010	6:50:57 PM	PHl3 MFC set to  0.000000
9/16/2010	6:50:57 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:50:57 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:50:57 PM	Tube furnace set to 0
9/16/2010	6:51:58 PM	H2 valve closed
9/16/2010	6:51:58 PM	BCl3 valve closed
9/16/2010	6:51:58 PM	PH3 valve closed
9/16/2010	6:51:58 PM	SiCl4 pre valve closed
9/16/2010	6:51:58 PM	SiCl4 post valve closed
9/16/2010	6:51:58 PM	Bubbler valve closed
9/16/2010	6:51:58 PM	Helium valve opened
9/16/2010	6:51:58 PM	Main Vac valve opened
9/16/2010	6:51:58 PM	Bypass valve opened
9/16/2010	6:51:58 PM	Helium MFC set to  100.000000
9/16/2010	6:51:58 PM	H2 MFC set to  0.000000
9/16/2010	6:51:58 PM	BCl3 MFC set to  0.000000
9/16/2010	6:51:58 PM	PHl3 MFC set to  0.000000
9/16/2010	6:51:58 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:51:58 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:51:58 PM	Tube furnace set to 0
9/16/2010	6:52:58 PM	Helium valve closed
9/16/2010	6:52:58 PM	H2 valve closed
9/16/2010	6:52:58 PM	BCl3 valve closed
9/16/2010	6:52:58 PM	PH3 valve closed
9/16/2010	6:52:58 PM	SiCl4 pre valve closed
9/16/2010	6:52:58 PM	SiCl4 post valve closed
9/16/2010	6:52:58 PM	Bubbler valve closed
9/16/2010	6:52:58 PM	Main Vac valve opened
9/16/2010	6:52:58 PM	Bypass valve opened
9/16/2010	6:52:58 PM	Helium MFC set to  0.000000
9/16/2010	6:52:58 PM	H2 MFC set to  0.000000
9/16/2010	6:52:58 PM	BCl3 MFC set to  0.000000
9/16/2010	6:52:58 PM	PHl3 MFC set to  0.000000
9/16/2010	6:52:58 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:52:58 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:52:58 PM	Tube furnace set to 0
9/16/2010	6:53:58 PM	H2 valve closed
9/16/2010	6:53:58 PM	BCl3 valve closed
9/16/2010	6:53:58 PM	PH3 valve closed
9/16/2010	6:53:58 PM	SiCl4 pre valve closed
9/16/2010	6:53:58 PM	SiCl4 post valve closed
9/16/2010	6:53:58 PM	Bubbler valve closed
9/16/2010	6:53:58 PM	Helium valve opened
9/16/2010	6:53:58 PM	Main Vac valve opened
9/16/2010	6:53:58 PM	Bypass valve opened
9/16/2010	6:53:58 PM	Helium MFC set to  100.000000
9/16/2010	6:53:58 PM	H2 MFC set to  0.000000
9/16/2010	6:53:58 PM	BCl3 MFC set to  0.000000
9/16/2010	6:53:58 PM	PHl3 MFC set to  0.000000
9/16/2010	6:53:58 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:53:58 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:53:58 PM	Tube furnace set to 0
9/16/2010	6:54:58 PM	Helium valve closed
9/16/2010	6:54:58 PM	H2 valve closed
9/16/2010	6:54:58 PM	BCl3 valve closed
9/16/2010	6:54:58 PM	PH3 valve closed
9/16/2010	6:54:58 PM	SiCl4 pre valve closed
9/16/2010	6:54:58 PM	SiCl4 post valve closed
9/16/2010	6:54:58 PM	Bubbler valve closed
9/16/2010	6:54:58 PM	Main Vac valve opened
9/16/2010	6:54:58 PM	Bypass valve opened
9/16/2010	6:54:58 PM	Helium MFC set to  0.000000
9/16/2010	6:54:58 PM	H2 MFC set to  0.000000
9/16/2010	6:54:58 PM	BCl3 MFC set to  0.000000
9/16/2010	6:54:58 PM	PHl3 MFC set to  0.000000
9/16/2010	6:54:58 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:54:58 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:54:58 PM	Tube furnace set to 0
9/16/2010	6:55:58 PM	H2 valve closed
9/16/2010	6:55:58 PM	BCl3 valve closed
9/16/2010	6:55:58 PM	PH3 valve closed
9/16/2010	6:55:58 PM	SiCl4 pre valve closed
9/16/2010	6:55:58 PM	SiCl4 post valve closed
9/16/2010	6:55:58 PM	Bubbler valve closed
9/16/2010	6:55:58 PM	Helium valve opened
9/16/2010	6:55:58 PM	Main Vac valve opened
9/16/2010	6:55:58 PM	Bypass valve opened
9/16/2010	6:55:58 PM	Helium MFC set to  100.000000
9/16/2010	6:55:58 PM	H2 MFC set to  0.000000
9/16/2010	6:55:58 PM	BCl3 MFC set to  0.000000
9/16/2010	6:55:58 PM	PHl3 MFC set to  0.000000
9/16/2010	6:55:58 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:55:58 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:55:59 PM	Tube furnace set to 0
9/16/2010	6:56:59 PM	Helium valve closed
9/16/2010	6:56:59 PM	H2 valve closed
9/16/2010	6:56:59 PM	BCl3 valve closed
9/16/2010	6:56:59 PM	PH3 valve closed
9/16/2010	6:56:59 PM	SiCl4 pre valve closed
9/16/2010	6:56:59 PM	SiCl4 post valve closed
9/16/2010	6:56:59 PM	Bubbler valve closed
9/16/2010	6:56:59 PM	Main Vac valve opened
9/16/2010	6:56:59 PM	Bypass valve opened
9/16/2010	6:56:59 PM	Helium MFC set to  0.000000
9/16/2010	6:56:59 PM	H2 MFC set to  0.000000
9/16/2010	6:56:59 PM	BCl3 MFC set to  0.000000
9/16/2010	6:56:59 PM	PHl3 MFC set to  0.000000
9/16/2010	6:56:59 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:56:59 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:56:59 PM	Tube furnace set to 0
9/16/2010	6:57:59 PM	H2 valve closed
9/16/2010	6:57:59 PM	BCl3 valve closed
9/16/2010	6:57:59 PM	PH3 valve closed
9/16/2010	6:57:59 PM	SiCl4 pre valve closed
9/16/2010	6:57:59 PM	SiCl4 post valve closed
9/16/2010	6:57:59 PM	Bubbler valve closed
9/16/2010	6:57:59 PM	Helium valve opened
9/16/2010	6:57:59 PM	Main Vac valve opened
9/16/2010	6:57:59 PM	Bypass valve opened
9/16/2010	6:57:59 PM	Helium MFC set to  100.000000
9/16/2010	6:57:59 PM	H2 MFC set to  0.000000
9/16/2010	6:57:59 PM	BCl3 MFC set to  0.000000
9/16/2010	6:57:59 PM	PHl3 MFC set to  0.000000
9/16/2010	6:57:59 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:57:59 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:57:59 PM	Tube furnace set to 0
9/16/2010	6:58:59 PM	Helium valve closed
9/16/2010	6:58:59 PM	H2 valve closed
9/16/2010	6:58:59 PM	BCl3 valve closed
9/16/2010	6:58:59 PM	PH3 valve closed
9/16/2010	6:58:59 PM	SiCl4 pre valve closed
9/16/2010	6:58:59 PM	SiCl4 post valve closed
9/16/2010	6:58:59 PM	Bubbler valve closed
9/16/2010	6:58:59 PM	Main Vac valve opened
9/16/2010	6:58:59 PM	Bypass valve opened
9/16/2010	6:58:59 PM	Helium MFC set to  0.000000
9/16/2010	6:58:59 PM	H2 MFC set to  0.000000
9/16/2010	6:58:59 PM	BCl3 MFC set to  0.000000
9/16/2010	6:58:59 PM	PHl3 MFC set to  0.000000
9/16/2010	6:58:59 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:58:59 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:58:59 PM	Tube furnace set to 0
9/16/2010	6:59:59 PM	H2 valve closed
9/16/2010	6:59:59 PM	BCl3 valve closed
9/16/2010	6:59:59 PM	PH3 valve closed
9/16/2010	6:59:59 PM	SiCl4 pre valve closed
9/16/2010	6:59:59 PM	SiCl4 post valve closed
9/16/2010	6:59:59 PM	Bubbler valve closed
9/16/2010	6:59:59 PM	Helium valve opened
9/16/2010	6:59:59 PM	Main Vac valve opened
9/16/2010	6:59:59 PM	Bypass valve opened
9/16/2010	6:59:59 PM	Helium MFC set to  100.000000
9/16/2010	6:59:59 PM	H2 MFC set to  0.000000
9/16/2010	6:59:59 PM	BCl3 MFC set to  0.000000
9/16/2010	6:59:59 PM	PHl3 MFC set to  0.000000
9/16/2010	6:59:59 PM	SiCl4 MFC set to  0.000000
9/16/2010	6:59:59 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	6:59:59 PM	Tube furnace set to 0
9/16/2010	7:00:59 PM	Helium valve closed
9/16/2010	7:00:59 PM	H2 valve closed
9/16/2010	7:00:59 PM	BCl3 valve closed
9/16/2010	7:00:59 PM	PH3 valve closed
9/16/2010	7:00:59 PM	SiCl4 pre valve closed
9/16/2010	7:00:59 PM	SiCl4 post valve closed
9/16/2010	7:00:59 PM	Bubbler valve closed
9/16/2010	7:00:59 PM	Main Vac valve opened
9/16/2010	7:00:59 PM	Bypass valve opened
9/16/2010	7:00:59 PM	Helium MFC set to  0.000000
9/16/2010	7:00:59 PM	H2 MFC set to  0.000000
9/16/2010	7:00:59 PM	BCl3 MFC set to  0.000000
9/16/2010	7:00:59 PM	PHl3 MFC set to  0.000000
9/16/2010	7:00:59 PM	SiCl4 MFC set to  0.000000
9/16/2010	7:00:59 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	7:01:00 PM	Tube furnace set to 0
9/16/2010	7:02:00 PM	H2 valve closed
9/16/2010	7:02:00 PM	BCl3 valve closed
9/16/2010	7:02:00 PM	PH3 valve closed
9/16/2010	7:02:00 PM	SiCl4 pre valve closed
9/16/2010	7:02:00 PM	SiCl4 post valve closed
9/16/2010	7:02:00 PM	Bubbler valve closed
9/16/2010	7:02:00 PM	Helium valve opened
9/16/2010	7:02:00 PM	Main Vac valve opened
9/16/2010	7:02:00 PM	Bypass valve opened
9/16/2010	7:02:00 PM	Helium MFC set to  100.000000
9/16/2010	7:02:00 PM	H2 MFC set to  0.000000
9/16/2010	7:02:00 PM	BCl3 MFC set to  0.000000
9/16/2010	7:02:00 PM	PHl3 MFC set to  0.000000
9/16/2010	7:02:00 PM	SiCl4 MFC set to  0.000000
9/16/2010	7:02:00 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	7:02:00 PM	Tube furnace set to 0
9/16/2010	7:03:00 PM	Helium valve closed
9/16/2010	7:03:00 PM	H2 valve closed
9/16/2010	7:03:00 PM	BCl3 valve closed
9/16/2010	7:03:00 PM	PH3 valve closed
9/16/2010	7:03:00 PM	SiCl4 pre valve closed
9/16/2010	7:03:00 PM	SiCl4 post valve closed
9/16/2010	7:03:00 PM	Bubbler valve closed
9/16/2010	7:03:00 PM	Main Vac valve opened
9/16/2010	7:03:00 PM	Bypass valve opened
9/16/2010	7:03:00 PM	Helium MFC set to  0.000000
9/16/2010	7:03:00 PM	H2 MFC set to  0.000000
9/16/2010	7:03:00 PM	BCl3 MFC set to  0.000000
9/16/2010	7:03:00 PM	PHl3 MFC set to  0.000000
9/16/2010	7:03:00 PM	SiCl4 MFC set to  0.000000
9/16/2010	7:03:00 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	7:03:00 PM	Tube furnace set to 0
9/16/2010	7:04:00 PM	H2 valve closed
9/16/2010	7:04:00 PM	BCl3 valve closed
9/16/2010	7:04:00 PM	PH3 valve closed
9/16/2010	7:04:00 PM	SiCl4 pre valve closed
9/16/2010	7:04:00 PM	SiCl4 post valve closed
9/16/2010	7:04:00 PM	Bubbler valve closed
9/16/2010	7:04:00 PM	Helium valve opened
9/16/2010	7:04:00 PM	Main Vac valve opened
9/16/2010	7:04:00 PM	Bypass valve opened
9/16/2010	7:04:00 PM	Helium MFC set to  100.000000
9/16/2010	7:04:00 PM	H2 MFC set to  0.000000
9/16/2010	7:04:00 PM	BCl3 MFC set to  0.000000
9/16/2010	7:04:00 PM	PHl3 MFC set to  0.000000
9/16/2010	7:04:00 PM	SiCl4 MFC set to  0.000000
9/16/2010	7:04:00 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	7:04:00 PM	Tube furnace set to 0
9/16/2010	7:05:00 PM	Helium valve closed
9/16/2010	7:05:00 PM	H2 valve closed
9/16/2010	7:05:00 PM	BCl3 valve closed
9/16/2010	7:05:00 PM	PH3 valve closed
9/16/2010	7:05:00 PM	SiCl4 pre valve closed
9/16/2010	7:05:00 PM	SiCl4 post valve closed
9/16/2010	7:05:00 PM	Bubbler valve closed
9/16/2010	7:05:00 PM	Main Vac valve opened
9/16/2010	7:05:00 PM	Bypass valve opened
9/16/2010	7:05:00 PM	Helium MFC set to  0.000000
9/16/2010	7:05:00 PM	H2 MFC set to  0.000000
9/16/2010	7:05:00 PM	BCl3 MFC set to  0.000000
9/16/2010	7:05:00 PM	PHl3 MFC set to  0.000000
9/16/2010	7:05:00 PM	SiCl4 MFC set to  0.000000
9/16/2010	7:05:00 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	7:05:00 PM	Tube furnace set to 0
9/16/2010	7:05:01 PM	Run finished at 7:05 PM
9/16/2010	7:05:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/16/2010	7:19:19 PM	Recipe started at 7:19 PM
9/16/2010	7:19:19 PM	Helium valve closed
9/16/2010	7:19:19 PM	BCl3 valve closed
9/16/2010	7:19:19 PM	PH3 valve closed
9/16/2010	7:19:19 PM	SiCl4 pre valve closed
9/16/2010	7:19:19 PM	SiCl4 post valve closed
9/16/2010	7:19:19 PM	Main Vac valve closed
9/16/2010	7:19:19 PM	Bypass valve closed
9/16/2010	7:19:19 PM	Bubbler valve closed
9/16/2010	7:19:19 PM	H2 valve opened
9/16/2010	7:19:19 PM	Helium MFC set to  0.000000
9/16/2010	7:19:19 PM	H2 MFC set to  500.000000
9/16/2010	7:19:19 PM	BCl3 MFC set to  0.000000
9/16/2010	7:19:19 PM	PHl3 MFC set to  0.000000
9/16/2010	7:19:19 PM	SiCl4 MFC set to  0.000000
9/16/2010	7:19:19 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	7:19:19 PM	Tube furnace set to 0
9/16/2010	7:20:40 PM	Helium valve closed
9/16/2010	7:20:40 PM	BCl3 valve closed
9/16/2010	7:20:40 PM	PH3 valve closed
9/16/2010	7:20:40 PM	SiCl4 pre valve closed
9/16/2010	7:20:40 PM	SiCl4 post valve closed
9/16/2010	7:20:40 PM	Main Vac valve closed
9/16/2010	7:20:40 PM	Bypass valve closed
9/16/2010	7:20:40 PM	H2 valve opened
9/16/2010	7:20:40 PM	Bubbler valve opened
9/16/2010	7:20:40 PM	Helium MFC set to  0.000000
9/16/2010	7:20:40 PM	H2 MFC set to  500.000000
9/16/2010	7:20:40 PM	BCl3 MFC set to  0.000000
9/16/2010	7:20:40 PM	PHl3 MFC set to  0.000000
9/16/2010	7:20:40 PM	SiCl4 MFC set to  0.000000
9/16/2010	7:20:40 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	7:20:40 PM	Tube furnace set to 1000
9/16/2010	7:29:09 PM	Helium valve closed
9/16/2010	7:29:09 PM	BCl3 valve closed
9/16/2010	7:29:09 PM	PH3 valve closed
9/16/2010	7:29:09 PM	Main Vac valve closed
9/16/2010	7:29:09 PM	Bypass valve closed
9/16/2010	7:29:09 PM	H2 valve opened
9/16/2010	7:29:09 PM	SiCl4 pre valve opened
9/16/2010	7:29:09 PM	SiCl4 post valve opened
9/16/2010	7:29:10 PM	Bubbler valve opened
9/16/2010	7:29:10 PM	Helium MFC set to  0.000000
9/16/2010	7:29:10 PM	H2 MFC set to  500.000000
9/16/2010	7:29:10 PM	BCl3 MFC set to  0.000000
9/16/2010	7:29:10 PM	PHl3 MFC set to  0.000000
9/16/2010	7:29:10 PM	SiCl4 MFC set to  50.000000
9/16/2010	7:29:10 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	7:29:10 PM	Tube furnace set to 1000
9/16/2010	7:32:30 PM	Helium valve closed
9/16/2010	7:32:30 PM	BCl3 valve closed
9/16/2010	7:32:30 PM	PH3 valve closed
9/16/2010	7:32:30 PM	Main Vac valve closed
9/16/2010	7:32:30 PM	Bypass valve closed
9/16/2010	7:32:30 PM	H2 valve opened
9/16/2010	7:32:30 PM	SiCl4 pre valve opened
9/16/2010	7:32:30 PM	SiCl4 post valve opened
9/16/2010	7:32:30 PM	Bubbler valve opened
9/16/2010	7:32:30 PM	Helium MFC set to  0.000000
9/16/2010	7:32:30 PM	H2 MFC set to  500.000000
9/16/2010	7:32:30 PM	BCl3 MFC set to  0.000000
9/16/2010	7:32:30 PM	PHl3 MFC set to  0.000000
9/16/2010	7:32:30 PM	SiCl4 MFC set to  50.000000
9/16/2010	7:32:30 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	7:32:30 PM	Tube furnace set to 1000
9/16/2010	7:37:30 PM	H2 valve closed
9/16/2010	7:37:30 PM	BCl3 valve closed
9/16/2010	7:37:30 PM	PH3 valve closed
9/16/2010	7:37:30 PM	SiCl4 pre valve closed
9/16/2010	7:37:30 PM	SiCl4 post valve closed
9/16/2010	7:37:30 PM	Main Vac valve closed
9/16/2010	7:37:30 PM	Bypass valve closed
9/16/2010	7:37:30 PM	Helium valve opened
9/16/2010	7:37:30 PM	Bubbler valve opened
9/16/2010	7:37:30 PM	Helium MFC set to  500.000000
9/16/2010	7:37:30 PM	H2 MFC set to  0.000000
9/16/2010	7:37:30 PM	BCl3 MFC set to  0.000000
9/16/2010	7:37:30 PM	PHl3 MFC set to  0.000000
9/16/2010	7:37:30 PM	SiCl4 MFC set to  0.000000
9/16/2010	7:37:30 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	7:37:30 PM	Tube furnace set to 0
9/16/2010	7:57:30 PM	Helium valve closed
9/16/2010	7:57:30 PM	H2 valve closed
9/16/2010	7:57:30 PM	BCl3 valve closed
9/16/2010	7:57:30 PM	PH3 valve closed
9/16/2010	7:57:30 PM	SiCl4 pre valve closed
9/16/2010	7:57:30 PM	SiCl4 post valve closed
9/16/2010	7:57:30 PM	Main Vac valve closed
9/16/2010	7:57:30 PM	Bypass valve closed
9/16/2010	7:57:30 PM	Bubbler valve closed
9/16/2010	7:57:30 PM	Helium MFC set to  0.000000
9/16/2010	7:57:30 PM	H2 MFC set to  0.000000
9/16/2010	7:57:31 PM	BCl3 MFC set to  0.000000
9/16/2010	7:57:31 PM	PHl3 MFC set to  0.000000
9/16/2010	7:57:31 PM	SiCl4 MFC set to  0.000000
9/16/2010	7:57:31 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	7:57:31 PM	Tube furnace set to 0
9/16/2010	7:57:31 PM	Run finished at 7:57 PM
9/16/2010	8:59:56 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/16/2010	8:59:57 PM	Recipe started at 8:59 PM
9/16/2010	8:59:57 PM	Helium valve closed
9/16/2010	8:59:57 PM	H2 valve closed
9/16/2010	8:59:57 PM	BCl3 valve closed
9/16/2010	8:59:57 PM	PH3 valve closed
9/16/2010	8:59:57 PM	SiCl4 pre valve closed
9/16/2010	8:59:57 PM	SiCl4 post valve closed
9/16/2010	8:59:57 PM	Main Vac valve closed
9/16/2010	8:59:57 PM	Bubbler valve closed
9/16/2010	8:59:57 PM	Bypass valve opened
9/16/2010	8:59:57 PM	Helium MFC set to  0.000000
9/16/2010	8:59:57 PM	H2 MFC set to  0.000000
9/16/2010	8:59:57 PM	BCl3 MFC set to  0.000000
9/16/2010	8:59:57 PM	PHl3 MFC set to  0.000000
9/16/2010	8:59:57 PM	SiCl4 MFC set to  0.000000
9/16/2010	8:59:57 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	8:59:57 PM	Tube furnace set to 0
9/16/2010	9:00:39 PM	Helium valve closed
9/16/2010	9:00:39 PM	H2 valve closed
9/16/2010	9:00:39 PM	BCl3 valve closed
9/16/2010	9:00:39 PM	PH3 valve closed
9/16/2010	9:00:39 PM	SiCl4 pre valve closed
9/16/2010	9:00:39 PM	SiCl4 post valve closed
9/16/2010	9:00:39 PM	Bubbler valve closed
9/16/2010	9:00:39 PM	Main Vac valve opened
9/16/2010	9:00:39 PM	Bypass valve opened
9/16/2010	9:00:39 PM	Helium MFC set to  0.000000
9/16/2010	9:00:39 PM	H2 MFC set to  0.000000
9/16/2010	9:00:39 PM	BCl3 MFC set to  0.000000
9/16/2010	9:00:39 PM	PHl3 MFC set to  0.000000
9/16/2010	9:00:39 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:00:39 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:00:39 PM	Tube furnace set to 0
9/16/2010	9:00:40 PM	Run finished at 9:00 PM
9/16/2010	9:00:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/16/2010	9:15:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/16/2010	9:15:30 PM	Recipe started at 9:15 PM
9/16/2010	9:15:30 PM	Helium valve closed
9/16/2010	9:15:30 PM	H2 valve closed
9/16/2010	9:15:30 PM	BCl3 valve closed
9/16/2010	9:15:30 PM	PH3 valve closed
9/16/2010	9:15:30 PM	SiCl4 pre valve closed
9/16/2010	9:15:30 PM	SiCl4 post valve closed
9/16/2010	9:15:30 PM	Main Vac valve closed
9/16/2010	9:15:30 PM	Bubbler valve closed
9/16/2010	9:15:30 PM	Bypass valve opened
9/16/2010	9:15:30 PM	Helium MFC set to  0.000000
9/16/2010	9:15:30 PM	H2 MFC set to  0.000000
9/16/2010	9:15:30 PM	BCl3 MFC set to  0.000000
9/16/2010	9:15:30 PM	PHl3 MFC set to  0.000000
9/16/2010	9:15:30 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:15:30 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:15:30 PM	Tube furnace set to 0
9/16/2010	9:15:31 PM	Helium valve closed
9/16/2010	9:15:31 PM	H2 valve closed
9/16/2010	9:15:31 PM	BCl3 valve closed
9/16/2010	9:15:31 PM	PH3 valve closed
9/16/2010	9:15:31 PM	SiCl4 pre valve closed
9/16/2010	9:15:31 PM	SiCl4 post valve closed
9/16/2010	9:15:31 PM	Bubbler valve closed
9/16/2010	9:15:31 PM	Main Vac valve opened
9/16/2010	9:15:31 PM	Bypass valve opened
9/16/2010	9:15:31 PM	Helium MFC set to  0.000000
9/16/2010	9:15:31 PM	H2 MFC set to  0.000000
9/16/2010	9:15:31 PM	BCl3 MFC set to  0.000000
9/16/2010	9:15:31 PM	PHl3 MFC set to  0.000000
9/16/2010	9:15:31 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:15:31 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:15:31 PM	Tube furnace set to 0
9/16/2010	9:16:31 PM	H2 valve closed
9/16/2010	9:16:31 PM	BCl3 valve closed
9/16/2010	9:16:31 PM	PH3 valve closed
9/16/2010	9:16:31 PM	SiCl4 pre valve closed
9/16/2010	9:16:31 PM	SiCl4 post valve closed
9/16/2010	9:16:31 PM	Bubbler valve closed
9/16/2010	9:16:31 PM	Helium valve opened
9/16/2010	9:16:31 PM	Main Vac valve opened
9/16/2010	9:16:31 PM	Bypass valve opened
9/16/2010	9:16:31 PM	Helium MFC set to  100.000000
9/16/2010	9:16:31 PM	H2 MFC set to  0.000000
9/16/2010	9:16:31 PM	BCl3 MFC set to  0.000000
9/16/2010	9:16:31 PM	PHl3 MFC set to  0.000000
9/16/2010	9:16:31 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:16:31 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:16:31 PM	Tube furnace set to 0
9/16/2010	9:17:31 PM	Helium valve closed
9/16/2010	9:17:31 PM	H2 valve closed
9/16/2010	9:17:31 PM	BCl3 valve closed
9/16/2010	9:17:31 PM	PH3 valve closed
9/16/2010	9:17:31 PM	SiCl4 pre valve closed
9/16/2010	9:17:31 PM	SiCl4 post valve closed
9/16/2010	9:17:31 PM	Bubbler valve closed
9/16/2010	9:17:31 PM	Main Vac valve opened
9/16/2010	9:17:31 PM	Bypass valve opened
9/16/2010	9:17:31 PM	Helium MFC set to  0.000000
9/16/2010	9:17:31 PM	H2 MFC set to  0.000000
9/16/2010	9:17:31 PM	BCl3 MFC set to  0.000000
9/16/2010	9:17:31 PM	PHl3 MFC set to  0.000000
9/16/2010	9:17:31 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:17:31 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:17:31 PM	Tube furnace set to 0
9/16/2010	9:18:31 PM	H2 valve closed
9/16/2010	9:18:31 PM	BCl3 valve closed
9/16/2010	9:18:31 PM	PH3 valve closed
9/16/2010	9:18:31 PM	SiCl4 pre valve closed
9/16/2010	9:18:31 PM	SiCl4 post valve closed
9/16/2010	9:18:31 PM	Bubbler valve closed
9/16/2010	9:18:31 PM	Helium valve opened
9/16/2010	9:18:31 PM	Main Vac valve opened
9/16/2010	9:18:31 PM	Bypass valve opened
9/16/2010	9:18:31 PM	Helium MFC set to  100.000000
9/16/2010	9:18:31 PM	H2 MFC set to  0.000000
9/16/2010	9:18:31 PM	BCl3 MFC set to  0.000000
9/16/2010	9:18:31 PM	PHl3 MFC set to  0.000000
9/16/2010	9:18:31 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:18:31 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:18:31 PM	Tube furnace set to 0
9/16/2010	9:19:31 PM	Helium valve closed
9/16/2010	9:19:31 PM	H2 valve closed
9/16/2010	9:19:31 PM	BCl3 valve closed
9/16/2010	9:19:31 PM	PH3 valve closed
9/16/2010	9:19:31 PM	SiCl4 pre valve closed
9/16/2010	9:19:31 PM	SiCl4 post valve closed
9/16/2010	9:19:31 PM	Bubbler valve closed
9/16/2010	9:19:31 PM	Main Vac valve opened
9/16/2010	9:19:31 PM	Bypass valve opened
9/16/2010	9:19:31 PM	Helium MFC set to  0.000000
9/16/2010	9:19:31 PM	H2 MFC set to  0.000000
9/16/2010	9:19:31 PM	BCl3 MFC set to  0.000000
9/16/2010	9:19:31 PM	PHl3 MFC set to  0.000000
9/16/2010	9:19:31 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:19:31 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:19:31 PM	Tube furnace set to 0
9/16/2010	9:20:32 PM	H2 valve closed
9/16/2010	9:20:32 PM	BCl3 valve closed
9/16/2010	9:20:32 PM	PH3 valve closed
9/16/2010	9:20:32 PM	SiCl4 pre valve closed
9/16/2010	9:20:32 PM	SiCl4 post valve closed
9/16/2010	9:20:32 PM	Bubbler valve closed
9/16/2010	9:20:32 PM	Helium valve opened
9/16/2010	9:20:32 PM	Main Vac valve opened
9/16/2010	9:20:32 PM	Bypass valve opened
9/16/2010	9:20:32 PM	Helium MFC set to  100.000000
9/16/2010	9:20:32 PM	H2 MFC set to  0.000000
9/16/2010	9:20:32 PM	BCl3 MFC set to  0.000000
9/16/2010	9:20:32 PM	PHl3 MFC set to  0.000000
9/16/2010	9:20:32 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:20:32 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:20:32 PM	Tube furnace set to 0
9/16/2010	9:21:32 PM	Helium valve closed
9/16/2010	9:21:32 PM	H2 valve closed
9/16/2010	9:21:32 PM	BCl3 valve closed
9/16/2010	9:21:32 PM	PH3 valve closed
9/16/2010	9:21:32 PM	SiCl4 pre valve closed
9/16/2010	9:21:32 PM	SiCl4 post valve closed
9/16/2010	9:21:32 PM	Bubbler valve closed
9/16/2010	9:21:32 PM	Main Vac valve opened
9/16/2010	9:21:32 PM	Bypass valve opened
9/16/2010	9:21:32 PM	Helium MFC set to  0.000000
9/16/2010	9:21:32 PM	H2 MFC set to  0.000000
9/16/2010	9:21:32 PM	BCl3 MFC set to  0.000000
9/16/2010	9:21:32 PM	PHl3 MFC set to  0.000000
9/16/2010	9:21:32 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:21:32 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:21:32 PM	Tube furnace set to 0
9/16/2010	9:22:32 PM	H2 valve closed
9/16/2010	9:22:32 PM	BCl3 valve closed
9/16/2010	9:22:32 PM	PH3 valve closed
9/16/2010	9:22:32 PM	SiCl4 pre valve closed
9/16/2010	9:22:32 PM	SiCl4 post valve closed
9/16/2010	9:22:32 PM	Bubbler valve closed
9/16/2010	9:22:32 PM	Helium valve opened
9/16/2010	9:22:32 PM	Main Vac valve opened
9/16/2010	9:22:32 PM	Bypass valve opened
9/16/2010	9:22:32 PM	Helium MFC set to  100.000000
9/16/2010	9:22:32 PM	H2 MFC set to  0.000000
9/16/2010	9:22:32 PM	BCl3 MFC set to  0.000000
9/16/2010	9:22:32 PM	PHl3 MFC set to  0.000000
9/16/2010	9:22:32 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:22:32 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:22:32 PM	Tube furnace set to 0
9/16/2010	9:23:32 PM	Helium valve closed
9/16/2010	9:23:32 PM	H2 valve closed
9/16/2010	9:23:32 PM	BCl3 valve closed
9/16/2010	9:23:32 PM	PH3 valve closed
9/16/2010	9:23:32 PM	SiCl4 pre valve closed
9/16/2010	9:23:32 PM	SiCl4 post valve closed
9/16/2010	9:23:32 PM	Bubbler valve closed
9/16/2010	9:23:32 PM	Main Vac valve opened
9/16/2010	9:23:32 PM	Bypass valve opened
9/16/2010	9:23:32 PM	Helium MFC set to  0.000000
9/16/2010	9:23:32 PM	H2 MFC set to  0.000000
9/16/2010	9:23:32 PM	BCl3 MFC set to  0.000000
9/16/2010	9:23:32 PM	PHl3 MFC set to  0.000000
9/16/2010	9:23:32 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:23:32 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:23:32 PM	Tube furnace set to 0
9/16/2010	9:24:32 PM	H2 valve closed
9/16/2010	9:24:32 PM	BCl3 valve closed
9/16/2010	9:24:32 PM	PH3 valve closed
9/16/2010	9:24:32 PM	SiCl4 pre valve closed
9/16/2010	9:24:32 PM	SiCl4 post valve closed
9/16/2010	9:24:32 PM	Bubbler valve closed
9/16/2010	9:24:32 PM	Helium valve opened
9/16/2010	9:24:32 PM	Main Vac valve opened
9/16/2010	9:24:32 PM	Bypass valve opened
9/16/2010	9:24:32 PM	Helium MFC set to  100.000000
9/16/2010	9:24:32 PM	H2 MFC set to  0.000000
9/16/2010	9:24:32 PM	BCl3 MFC set to  0.000000
9/16/2010	9:24:32 PM	PHl3 MFC set to  0.000000
9/16/2010	9:24:32 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:24:32 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:24:33 PM	Tube furnace set to 0
9/16/2010	9:25:33 PM	Helium valve closed
9/16/2010	9:25:33 PM	H2 valve closed
9/16/2010	9:25:33 PM	BCl3 valve closed
9/16/2010	9:25:33 PM	PH3 valve closed
9/16/2010	9:25:33 PM	SiCl4 pre valve closed
9/16/2010	9:25:33 PM	SiCl4 post valve closed
9/16/2010	9:25:33 PM	Bubbler valve closed
9/16/2010	9:25:33 PM	Main Vac valve opened
9/16/2010	9:25:33 PM	Bypass valve opened
9/16/2010	9:25:33 PM	Helium MFC set to  0.000000
9/16/2010	9:25:33 PM	H2 MFC set to  0.000000
9/16/2010	9:25:33 PM	BCl3 MFC set to  0.000000
9/16/2010	9:25:33 PM	PHl3 MFC set to  0.000000
9/16/2010	9:25:33 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:25:33 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:25:33 PM	Tube furnace set to 0
9/16/2010	9:26:33 PM	H2 valve closed
9/16/2010	9:26:33 PM	BCl3 valve closed
9/16/2010	9:26:33 PM	PH3 valve closed
9/16/2010	9:26:33 PM	SiCl4 pre valve closed
9/16/2010	9:26:33 PM	SiCl4 post valve closed
9/16/2010	9:26:33 PM	Bubbler valve closed
9/16/2010	9:26:33 PM	Helium valve opened
9/16/2010	9:26:33 PM	Main Vac valve opened
9/16/2010	9:26:33 PM	Bypass valve opened
9/16/2010	9:26:33 PM	Helium MFC set to  100.000000
9/16/2010	9:26:33 PM	H2 MFC set to  0.000000
9/16/2010	9:26:33 PM	BCl3 MFC set to  0.000000
9/16/2010	9:26:33 PM	PHl3 MFC set to  0.000000
9/16/2010	9:26:33 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:26:33 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:26:33 PM	Tube furnace set to 0
9/16/2010	9:27:33 PM	Helium valve closed
9/16/2010	9:27:33 PM	H2 valve closed
9/16/2010	9:27:33 PM	BCl3 valve closed
9/16/2010	9:27:33 PM	PH3 valve closed
9/16/2010	9:27:33 PM	SiCl4 pre valve closed
9/16/2010	9:27:33 PM	SiCl4 post valve closed
9/16/2010	9:27:33 PM	Bubbler valve closed
9/16/2010	9:27:33 PM	Main Vac valve opened
9/16/2010	9:27:33 PM	Bypass valve opened
9/16/2010	9:27:33 PM	Helium MFC set to  0.000000
9/16/2010	9:27:33 PM	H2 MFC set to  0.000000
9/16/2010	9:27:33 PM	BCl3 MFC set to  0.000000
9/16/2010	9:27:33 PM	PHl3 MFC set to  0.000000
9/16/2010	9:27:33 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:27:33 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:27:33 PM	Tube furnace set to 0
9/16/2010	9:28:33 PM	H2 valve closed
9/16/2010	9:28:33 PM	BCl3 valve closed
9/16/2010	9:28:33 PM	PH3 valve closed
9/16/2010	9:28:33 PM	SiCl4 pre valve closed
9/16/2010	9:28:33 PM	SiCl4 post valve closed
9/16/2010	9:28:33 PM	Bubbler valve closed
9/16/2010	9:28:33 PM	Helium valve opened
9/16/2010	9:28:33 PM	Main Vac valve opened
9/16/2010	9:28:33 PM	Bypass valve opened
9/16/2010	9:28:33 PM	Helium MFC set to  100.000000
9/16/2010	9:28:33 PM	H2 MFC set to  0.000000
9/16/2010	9:28:33 PM	BCl3 MFC set to  0.000000
9/16/2010	9:28:33 PM	PHl3 MFC set to  0.000000
9/16/2010	9:28:33 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:28:33 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:28:33 PM	Tube furnace set to 0
9/16/2010	9:29:33 PM	Helium valve closed
9/16/2010	9:29:33 PM	H2 valve closed
9/16/2010	9:29:33 PM	BCl3 valve closed
9/16/2010	9:29:33 PM	PH3 valve closed
9/16/2010	9:29:33 PM	SiCl4 pre valve closed
9/16/2010	9:29:33 PM	SiCl4 post valve closed
9/16/2010	9:29:33 PM	Bubbler valve closed
9/16/2010	9:29:33 PM	Main Vac valve opened
9/16/2010	9:29:33 PM	Bypass valve opened
9/16/2010	9:29:33 PM	Helium MFC set to  0.000000
9/16/2010	9:29:33 PM	H2 MFC set to  0.000000
9/16/2010	9:29:33 PM	BCl3 MFC set to  0.000000
9/16/2010	9:29:33 PM	PHl3 MFC set to  0.000000
9/16/2010	9:29:33 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:29:33 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:29:34 PM	Tube furnace set to 0
9/16/2010	9:30:34 PM	H2 valve closed
9/16/2010	9:30:34 PM	BCl3 valve closed
9/16/2010	9:30:34 PM	PH3 valve closed
9/16/2010	9:30:34 PM	SiCl4 pre valve closed
9/16/2010	9:30:34 PM	SiCl4 post valve closed
9/16/2010	9:30:34 PM	Bubbler valve closed
9/16/2010	9:30:34 PM	Helium valve opened
9/16/2010	9:30:34 PM	Main Vac valve opened
9/16/2010	9:30:34 PM	Bypass valve opened
9/16/2010	9:30:34 PM	Helium MFC set to  100.000000
9/16/2010	9:30:34 PM	H2 MFC set to  0.000000
9/16/2010	9:30:34 PM	BCl3 MFC set to  0.000000
9/16/2010	9:30:34 PM	PHl3 MFC set to  0.000000
9/16/2010	9:30:34 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:30:34 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:30:34 PM	Tube furnace set to 0
9/16/2010	9:31:34 PM	Helium valve closed
9/16/2010	9:31:34 PM	H2 valve closed
9/16/2010	9:31:34 PM	BCl3 valve closed
9/16/2010	9:31:34 PM	PH3 valve closed
9/16/2010	9:31:34 PM	SiCl4 pre valve closed
9/16/2010	9:31:34 PM	SiCl4 post valve closed
9/16/2010	9:31:34 PM	Bubbler valve closed
9/16/2010	9:31:34 PM	Main Vac valve opened
9/16/2010	9:31:34 PM	Bypass valve opened
9/16/2010	9:31:34 PM	Helium MFC set to  0.000000
9/16/2010	9:31:34 PM	H2 MFC set to  0.000000
9/16/2010	9:31:34 PM	BCl3 MFC set to  0.000000
9/16/2010	9:31:34 PM	PHl3 MFC set to  0.000000
9/16/2010	9:31:34 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:31:34 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:31:34 PM	Tube furnace set to 0
9/16/2010	9:32:34 PM	H2 valve closed
9/16/2010	9:32:34 PM	BCl3 valve closed
9/16/2010	9:32:34 PM	PH3 valve closed
9/16/2010	9:32:34 PM	SiCl4 pre valve closed
9/16/2010	9:32:34 PM	SiCl4 post valve closed
9/16/2010	9:32:34 PM	Bubbler valve closed
9/16/2010	9:32:34 PM	Helium valve opened
9/16/2010	9:32:34 PM	Main Vac valve opened
9/16/2010	9:32:34 PM	Bypass valve opened
9/16/2010	9:32:34 PM	Helium MFC set to  100.000000
9/16/2010	9:32:34 PM	H2 MFC set to  0.000000
9/16/2010	9:32:34 PM	BCl3 MFC set to  0.000000
9/16/2010	9:32:34 PM	PHl3 MFC set to  0.000000
9/16/2010	9:32:34 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:32:34 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:32:34 PM	Tube furnace set to 0
9/16/2010	9:33:34 PM	Helium valve closed
9/16/2010	9:33:34 PM	H2 valve closed
9/16/2010	9:33:34 PM	BCl3 valve closed
9/16/2010	9:33:34 PM	PH3 valve closed
9/16/2010	9:33:34 PM	SiCl4 pre valve closed
9/16/2010	9:33:34 PM	SiCl4 post valve closed
9/16/2010	9:33:34 PM	Bubbler valve closed
9/16/2010	9:33:34 PM	Main Vac valve opened
9/16/2010	9:33:34 PM	Bypass valve opened
9/16/2010	9:33:34 PM	Helium MFC set to  0.000000
9/16/2010	9:33:34 PM	H2 MFC set to  0.000000
9/16/2010	9:33:34 PM	BCl3 MFC set to  0.000000
9/16/2010	9:33:34 PM	PHl3 MFC set to  0.000000
9/16/2010	9:33:34 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:33:34 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:33:34 PM	Tube furnace set to 0
9/16/2010	9:34:34 PM	H2 valve closed
9/16/2010	9:34:34 PM	BCl3 valve closed
9/16/2010	9:34:34 PM	PH3 valve closed
9/16/2010	9:34:34 PM	SiCl4 pre valve closed
9/16/2010	9:34:34 PM	SiCl4 post valve closed
9/16/2010	9:34:34 PM	Bubbler valve closed
9/16/2010	9:34:34 PM	Helium valve opened
9/16/2010	9:34:34 PM	Main Vac valve opened
9/16/2010	9:34:34 PM	Bypass valve opened
9/16/2010	9:34:34 PM	Helium MFC set to  100.000000
9/16/2010	9:34:34 PM	H2 MFC set to  0.000000
9/16/2010	9:34:34 PM	BCl3 MFC set to  0.000000
9/16/2010	9:34:35 PM	PHl3 MFC set to  0.000000
9/16/2010	9:34:35 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:34:35 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:34:35 PM	Tube furnace set to 0
9/16/2010	9:35:35 PM	Helium valve closed
9/16/2010	9:35:35 PM	H2 valve closed
9/16/2010	9:35:35 PM	BCl3 valve closed
9/16/2010	9:35:35 PM	PH3 valve closed
9/16/2010	9:35:35 PM	SiCl4 pre valve closed
9/16/2010	9:35:35 PM	SiCl4 post valve closed
9/16/2010	9:35:35 PM	Bubbler valve closed
9/16/2010	9:35:35 PM	Main Vac valve opened
9/16/2010	9:35:35 PM	Bypass valve opened
9/16/2010	9:35:35 PM	Helium MFC set to  0.000000
9/16/2010	9:35:35 PM	H2 MFC set to  0.000000
9/16/2010	9:35:35 PM	BCl3 MFC set to  0.000000
9/16/2010	9:35:35 PM	PHl3 MFC set to  0.000000
9/16/2010	9:35:35 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:35:35 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:35:35 PM	Tube furnace set to 0
9/16/2010	9:35:36 PM	Run finished at 9:35 PM
9/16/2010	9:35:36 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/16/2010	9:54:20 PM	Recipe started at 9:54 PM
9/16/2010	9:54:20 PM	Helium valve closed
9/16/2010	9:54:20 PM	BCl3 valve closed
9/16/2010	9:54:20 PM	PH3 valve closed
9/16/2010	9:54:20 PM	SiCl4 pre valve closed
9/16/2010	9:54:20 PM	SiCl4 post valve closed
9/16/2010	9:54:20 PM	Main Vac valve closed
9/16/2010	9:54:20 PM	Bypass valve closed
9/16/2010	9:54:20 PM	Bubbler valve closed
9/16/2010	9:54:20 PM	H2 valve opened
9/16/2010	9:54:20 PM	Helium MFC set to  0.000000
9/16/2010	9:54:20 PM	H2 MFC set to  500.000000
9/16/2010	9:54:20 PM	BCl3 MFC set to  0.000000
9/16/2010	9:54:20 PM	PHl3 MFC set to  0.000000
9/16/2010	9:54:20 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:54:20 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:54:20 PM	Tube furnace set to 0
9/16/2010	9:55:41 PM	Helium valve closed
9/16/2010	9:55:41 PM	BCl3 valve closed
9/16/2010	9:55:41 PM	PH3 valve closed
9/16/2010	9:55:41 PM	SiCl4 pre valve closed
9/16/2010	9:55:41 PM	SiCl4 post valve closed
9/16/2010	9:55:41 PM	Main Vac valve closed
9/16/2010	9:55:41 PM	Bypass valve closed
9/16/2010	9:55:41 PM	H2 valve opened
9/16/2010	9:55:41 PM	Bubbler valve opened
9/16/2010	9:55:41 PM	Helium MFC set to  0.000000
9/16/2010	9:55:41 PM	H2 MFC set to  500.000000
9/16/2010	9:55:41 PM	BCl3 MFC set to  0.000000
9/16/2010	9:55:41 PM	PHl3 MFC set to  0.000000
9/16/2010	9:55:41 PM	SiCl4 MFC set to  0.000000
9/16/2010	9:55:41 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	9:55:42 PM	Tube furnace set to 1000
9/16/2010	10:04:22 PM	Helium valve closed
9/16/2010	10:04:22 PM	BCl3 valve closed
9/16/2010	10:04:22 PM	Main Vac valve closed
9/16/2010	10:04:22 PM	Bypass valve closed
9/16/2010	10:04:22 PM	H2 valve opened
9/16/2010	10:04:22 PM	PH3 valve opened
9/16/2010	10:04:22 PM	SiCl4 pre valve opened
9/16/2010	10:04:22 PM	SiCl4 post valve opened
9/16/2010	10:04:22 PM	Bubbler valve opened
9/16/2010	10:04:22 PM	Helium MFC set to  0.000000
9/16/2010	10:04:22 PM	H2 MFC set to  500.000000
9/16/2010	10:04:22 PM	BCl3 MFC set to  0.000000
9/16/2010	10:04:22 PM	PHl3 MFC set to  0.500000
9/16/2010	10:04:22 PM	SiCl4 MFC set to  50.000000
9/16/2010	10:04:22 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	10:04:22 PM	Tube furnace set to 1000
9/16/2010	10:07:41 PM	Helium valve closed
9/16/2010	10:07:41 PM	BCl3 valve closed
9/16/2010	10:07:41 PM	Main Vac valve closed
9/16/2010	10:07:41 PM	Bypass valve closed
9/16/2010	10:07:41 PM	H2 valve opened
9/16/2010	10:07:41 PM	PH3 valve opened
9/16/2010	10:07:41 PM	SiCl4 pre valve opened
9/16/2010	10:07:41 PM	SiCl4 post valve opened
9/16/2010	10:07:41 PM	Bubbler valve opened
9/16/2010	10:07:41 PM	Helium MFC set to  0.000000
9/16/2010	10:07:41 PM	H2 MFC set to  500.000000
9/16/2010	10:07:41 PM	BCl3 MFC set to  0.000000
9/16/2010	10:07:41 PM	PHl3 MFC set to  0.500000
9/16/2010	10:07:41 PM	SiCl4 MFC set to  50.000000
9/16/2010	10:07:41 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	10:07:41 PM	Tube furnace set to 1000
9/16/2010	10:12:41 PM	H2 valve closed
9/16/2010	10:12:41 PM	BCl3 valve closed
9/16/2010	10:12:41 PM	PH3 valve closed
9/16/2010	10:12:41 PM	SiCl4 pre valve closed
9/16/2010	10:12:41 PM	SiCl4 post valve closed
9/16/2010	10:12:41 PM	Main Vac valve closed
9/16/2010	10:12:41 PM	Bypass valve closed
9/16/2010	10:12:41 PM	Helium valve opened
9/16/2010	10:12:41 PM	Bubbler valve opened
9/16/2010	10:12:41 PM	Helium MFC set to  500.000000
9/16/2010	10:12:41 PM	H2 MFC set to  0.000000
9/16/2010	10:12:41 PM	BCl3 MFC set to  0.000000
9/16/2010	10:12:41 PM	PHl3 MFC set to  0.000000
9/16/2010	10:12:41 PM	SiCl4 MFC set to  0.000000
9/16/2010	10:12:41 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	10:12:42 PM	Tube furnace set to 0
9/16/2010	10:32:42 PM	Helium valve closed
9/16/2010	10:32:42 PM	H2 valve closed
9/16/2010	10:32:42 PM	BCl3 valve closed
9/16/2010	10:32:42 PM	PH3 valve closed
9/16/2010	10:32:42 PM	SiCl4 pre valve closed
9/16/2010	10:32:42 PM	SiCl4 post valve closed
9/16/2010	10:32:42 PM	Main Vac valve closed
9/16/2010	10:32:42 PM	Bypass valve closed
9/16/2010	10:32:42 PM	Bubbler valve closed
9/16/2010	10:32:42 PM	Helium MFC set to  0.000000
9/16/2010	10:32:42 PM	H2 MFC set to  0.000000
9/16/2010	10:32:42 PM	BCl3 MFC set to  0.000000
9/16/2010	10:32:42 PM	PHl3 MFC set to  0.000000
9/16/2010	10:32:42 PM	SiCl4 MFC set to  0.000000
9/16/2010	10:32:42 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	10:32:42 PM	Tube furnace set to 0
9/16/2010	10:32:42 PM	Run finished at 10:32 PM
9/16/2010	11:21:34 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/16/2010	11:21:35 PM	Recipe started at 11:21 PM
9/16/2010	11:21:35 PM	Helium valve closed
9/16/2010	11:21:35 PM	H2 valve closed
9/16/2010	11:21:35 PM	BCl3 valve closed
9/16/2010	11:21:35 PM	PH3 valve closed
9/16/2010	11:21:35 PM	SiCl4 pre valve closed
9/16/2010	11:21:35 PM	SiCl4 post valve closed
9/16/2010	11:21:35 PM	Main Vac valve closed
9/16/2010	11:21:35 PM	Bubbler valve closed
9/16/2010	11:21:35 PM	Bypass valve opened
9/16/2010	11:21:35 PM	Helium MFC set to  0.000000
9/16/2010	11:21:35 PM	H2 MFC set to  0.000000
9/16/2010	11:21:35 PM	BCl3 MFC set to  0.000000
9/16/2010	11:21:35 PM	PHl3 MFC set to  0.000000
9/16/2010	11:21:35 PM	SiCl4 MFC set to  0.000000
9/16/2010	11:21:35 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	11:21:35 PM	Tube furnace set to 0
9/16/2010	11:22:16 PM	Helium valve closed
9/16/2010	11:22:16 PM	H2 valve closed
9/16/2010	11:22:16 PM	BCl3 valve closed
9/16/2010	11:22:16 PM	PH3 valve closed
9/16/2010	11:22:16 PM	SiCl4 pre valve closed
9/16/2010	11:22:16 PM	SiCl4 post valve closed
9/16/2010	11:22:16 PM	Bubbler valve closed
9/16/2010	11:22:16 PM	Main Vac valve opened
9/16/2010	11:22:16 PM	Bypass valve opened
9/16/2010	11:22:16 PM	Helium MFC set to  0.000000
9/16/2010	11:22:16 PM	H2 MFC set to  0.000000
9/16/2010	11:22:16 PM	BCl3 MFC set to  0.000000
9/16/2010	11:22:16 PM	PHl3 MFC set to  0.000000
9/16/2010	11:22:16 PM	SiCl4 MFC set to  0.000000
9/16/2010	11:22:16 PM	Bypass solenoid MFC set to  0.000000
9/16/2010	11:22:17 PM	Tube furnace set to 0
9/16/2010	11:22:17 PM	Run finished at 11:22 PM
9/16/2010	11:22:17 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
